I-graphite ehlanzekile kakhulu enezimbobo

I-graphite evuvukile kakhulu iyinto ebalulekile ekukhiqizweni kwe-semiconductor okuthuthukisiwe, lapho ukuzinza kwayo kokushisa okumangalisayo, amazinga okungcoliswa aphansi kakhulu, kanye nokuvumelana kwenqubo kubaluleke kakhulu. Izixazululo ze-graphite evuvukile kakhulu ze-Semixlab zenzelwe ngqo izinqubo ze-semiconductor ezishisa kakhulu nezizwela ukungcola.

Ezinqubweni ze-epitaxy, i-graphite enezimbobo eziphezulu isetshenziswa kakhulu ezingxenyeni ezibalulekile njengezibambi ze-substrate, izithwali ze-wafer, izakhiwo zokusatshalaliswa kwegesi, kanye nezakhi zensimu yokushisa. Ngesikhathi sokukhula kwe-epitaxial ye-Si, i-SiC, ne-GaN, ukufana kwezinga lokushisa okunembile kanye nokugeleza kwegesi okuzinzile kuyizinto ezibalulekile zokulawula ukujiya kwefilimu, ukufana kwe-doping, kanye nokucindezelwa kwamaphutha. Isakhiwo esincane se-porous se-graphite se-Semixlab senza ukusatshalaliswa kokushisa okufanayo kanye nokusabalala kwegesi okulawulwayo kulo lonke ubuso be-wafer, ngaleyo ndlela kuncishiswe ukungazinzi kwezinga lomngcele kanye nemiphumela yomphetho.

Ngesikhathi sezinqubo zokusabalala kanye nokushiswa kwe-oxidation ezidinga ukusebenza okuqhubekayo ngaphezu kuka-1000 °C, i-graphite evuvukile kakhulu esebenza njengesakhiwo esithembekile kanye nezinto zokusekela izikebhe ze-wafer, ama-liners, kanye nezingxenye zokushisa ezishisayo. Uma kuqhathaniswa ne-graphite ende, isakhiwo sayo esivuvukile sinciphisa ukucindezeleka kokushisa kanye nokuguquguquka ngesikhathi sokujikeleza okuphindaphindiwe kokushisa, sithuthukisa ukuzinza kobukhulu futhi sandise isikhathi sokuphila kwengxenye. Ukungangeni kwayo kwamakhemikhali kanye nokuqukethwe okuphansi kokungcola kusiza ukugcina indawo yenqubo ehlanzekile, isekela ukulawula okuqinile kumaphrofayili okusabalalisa ama-dopant kanye nekhwalithi yefilimu ye-oxide ngenkathi inciphisa izingozi zokukhiqizwa kwezinhlayiya kanye nokungcola okuwelanayo.

Ngezinqubo ze-CVD, LPCVD, kanye ne-PECVD, i-graphite enezimbobo ezihlanzekile kakhulu idlala indima ebalulekile kuma-heater, ama-wafer carrier, kanye nezingxenye zegumbi langaphakathi ezivezwe kumagesi asabelayo kanye namazinga okushisa aphezulu. Ukushisa okuhle kakhulu kwezinto ezibonakalayo kuqinisekisa ukudluliselwa kokushisa okusheshayo, okufanayo, kuyilapho isakhiwo sazo esinezimbobo sivumela ukubanjwa okulawulwayo kwemikhiqizo engaphansi kokufakwa, kunciphisa ukuqhekeka kanye nokukhululwa kwezinhlayiya ngesikhathi sokusebenza kwemishini ende. Lokhu kunegalelo ngqo ekuthuthukisweni kokuqina kwenqubo, izikhawu zokugcinwa ezinde, kanye nesikhathi sokusetshenziswa kwemishini esengeziwe.

I-graphite ye-Semixlab ehlanzekile kakhulu ikhiqizwa ngaphansi kohlelo lokulawula ikhwalithi oluqinile, ngokuphathwa ngokucophelela kokukhethwa kwezinto zokusetshenziswa, ukuhlanzwa, kanye nobunjiniyela be-microstructure. Uma kudingeka isikhathi eside senkonzo noma ukusebenza ezindaweni zamakhemikhali ezidinga kakhulu, lo mkhiqizo uyahambisana nezingubo zokuvikela ezithuthukisiwe njenge-SiC noma i-TaC. Sisebenzisa ukuguquguquka komklamo okumangalisayo, ukusebenza kahle, kanye nobuchwepheshe bokumboza be-semiconductor obuthuthukisiwe, izixazululo zethu zingalungiswa ngokunembile ngokwezidingo ezithile zepulatifomu yakho yemishini ye-semiconductor kanye ne-process node. Silangazelela ngobuqotho ukuba ngumlingani wakho wesikhathi eside eShayina.