I-TaC Coated LED epi susceptor

I-TaC ehlanganiswe ne-LED epi susceptor isebenzisa ubuchwepheshe bokunamathela obuphezulu be-tantalum carbide (TaC), obuklanyelwe ngokukhethekile okokusebenza kwe-MOCVD (i-metal organic chemical vapor deposition) futhi ifanele inqubo yokubeka izinga lokushisa eliphezulu lama-wafers e-LED epitaxial. Umkhiqizo unokumelana okuhle kakhulu nokushisa okuphezulu, ukumelana nokugqwala nokuzinza kokushisa, okunganciphisa kakhulu ukungcola nokuchithwa kwezinhlayiyana, futhi kunwebe impilo yesevisi. Kuyisinqumo esihle sokuthuthukisa isivuno se-epitaxial wafer ye-LED nokusebenza kahle kokukhiqiza.

Isicelo:

I-TaC ehlanganiswe ne-LED epi susceptor yakhelwe ngokukhethekile okokusebenza kwe-MOCVD futhi isetshenziswa kakhulu ekukhiqizweni kwe-LED epitaxial wafer, ikakhulukazi ekukhuleni kwe-epitaxial yama-LED e-gallium nitride (GaN) asekelwe eluhlaza okwesibhakabhaka kanye ne-ultraviolet. Ingakwazi futhi ukuhlangabezana nezidingo zokukhiqiza zamadivayisi we-semiconductor yamandla we-SiC/GaN futhi ifanele izinga lokushisa eliphezulu i-CVD, i-MBE kanye nezinye izivivinyo zokubeka izinto ezikhungweni zocwaningo lwesayensi.

Amasevisi anganikezwa:

Ukuhlaziywa kwesimo sohlelo lwekhasimende, izinto ezifanayo, ukuxazulula izinkinga zobuchwepheshe.

Iphrofayela Yenkampani:

I-Semixlab inamalabhorethri angu-2, ithimba lochwepheshe abaneminyaka engu-20 yokuhlangenwe nakho okubalulekile, abane-R&D kanye nokukhiqiza, amakhono okuhlola nokuqinisekisa.

Amapharamitha Technical

Izinkambu zohlelo lokusebenza eziyinhloko

Ukuqinisekiswa kochungechunge lwezemvelo

I-Semixlab TaC ehlanganiswe ne-LED epi susceptor's ecological chain verification ihlanganisa izinto ezingavuthiwe ekukhiqizeni, isiphumelele isitifiketi esijwayelekile samazwe ngamazwe, futhi inobuchwepheshe obuningi obunelungelo lobunikazi bokuqinisekisa ukwethembeka nokusimama kwayo kumkhakha we-semiconductor kanye nezinkambu zamandla amasha.

Inqubo yohlelo lokusebenza ejwayelekile

Ukulungiswa Kwezinto Eziluhlaza (Ukuhlolwa kwe-graphite okuhlanzeke kakhulu) → Ukwenziwa Kwe-Substrate (ukucindezela kwe-Isostatic) → Inqubo Yokumboza ye-TaC (ukufakwa kwe-CVD) → Ukucubungula Ngemva (Ukupholisha okunembayo) → Ukuhlolwa Kwekhwalithi → Ukupakisha Nokulethwa

Njengoba ubuchwepheshe be-LED buthuthukela kosayizi abancane kanye nokunemba okuphezulu njenge-Mini LED ne-Micro LED, izidingo zokuzinza nokulawula inqubo yemishini ye-MOCVD ziya ngokuya ziba phezulu. Ukugqugquzelwa kwe-TaC coated LED epi susceptor akukwazi nje ukuthuthukisa ukusebenza kahle kokukhiqizwa kwe-LED okukhona, kodwa futhi kuhlinzeke ngesisekelo sokukhiqiza esithembeke kakhulu sesizukulwane esilandelayo sobuchwepheshe bokuboniswa.

Ukuze uthole ukucaciswa okuningiliziwe kobuchwepheshe, amaphepha amhlophe, noma amalungiselelo okuhlola amasampula, sicela uxhumane nethimba lethu Lokusekela Ubuchwepheshe ukuze uhlole ukuthi i-Semixlab ingathuthukisa kanjani inqubo yakho ukusebenza kahle.

Izinzuzo ezibalulekile ze-Semixlab TaC ehlanganiswe ne-LED epi susceptor

Ukumelana nezinga lokushisa eliphezulu kakhulu

I-TaC-coated LED epitaxial susceptors yenziwe nge-high-purity tantalum carbide material, engasebenza ngokuzinza isikhathi eside ezindaweni ezinezinga lokushisa eliphezulu elingaphezu kuka-1200°C. Ngisho nangaphansi kwezimo zokushisa ezidlulele zenqubo ye-MOCVD, ukugqoka ngeke kuqhekeke noma kukhishwe, kuqinisekiswe ukufana nokuvumelana kwenqubo yokukhula kwe-epitaxial nokuthuthukisa ngempumelelo umkhiqizo womkhiqizo.

Ukumelana nokugqwala okuhle kakhulu

Phakathi nenqubo yokukhiqiza ama-wafers e-LED epitaxial, i-susceptor idinga ukuvezwa endaweni yegesi eyonakalisayo njenge-H2 ne-NH3 isikhathi eside. I-TaC enamathelayo inokungangeni kwamakhemikhali aqine ngokwedlulele futhi ingamelana ngempumelelo nokuguguleka kwegesi futhi igweme ukungcola okukhiqizwe i-oxidation noma ukusabela, ngaleyo ndlela iqinisekise ukuhlanzeka nokusebenza kwe-optoelectronic kwe-epitaxial wafer.

Ukuguqulwa kokushisa okuphansi

I-thermal expansion coefficient ye-TaC enamathelayo ifanelana kakhulu naleyo ye-graphite substrate, futhi i-susceptor ingakwazi ukugcina izinga lokushintsha eliphansi kakhulu lokushisa ngisho nalapho izinga lokushisa likhuphuka futhi lehla. Lesi sici singanciphisa kakhulu ingcuphe ye-epitaxial wafer warping, siqinisekise ukukhula okufanayo kongqimba lwe-epitaxial, futhi sithuthukise ukuhambisana komkhiqizo.

Ukuqedwa kwendawo ephezulu

Ingaphezulu le-susceptor lipholishelwe kahle, ngobulukhuni obulawulwa ngaphansi kuka-0.5μm, kwehlisa ngempumelelo izinga lokukhubazeka ngesikhathi sokukhula kwe-epitaxial. Indawo ebushelelezi nayo inganciphisa ukunamathela phakathi kwe-epitaxial wafer kanye ne-susceptor, okwenza kube lula ukususa i-wafer nokunciphisa ingozi yokuphuka kwe-wafer.

Idizayini yokuphila ende

Uma kuqhathaniswa nama-graphite susceptors endabuko, ukunamathela kwe-TaC kunokumelana kangcono nokugqokwa kanye nokumelana nokugqwala, futhi impilo yayo yesevisi ingandiswa izikhathi ezingaphezu kwezingu-3. Lokhu akugcini nje ukunciphisa imvamisa yokushintshwa okusebenzisekayo, kodwa futhi kunciphisa ukuguquguquka kwenqubo okubangelwa ukuguga kwe-susceptor, okunganciphisa kakhulu izindleko zokukhiqiza ngokuhamba kwesikhathi.