I-Quartz Diffusion Tube

I-Semixlab's Quartz Diffusion Tubes ayizinto ze-quartz ezihlanzeke kakhulu eziklanyelwe ukusabalalisa, i-oxidation, kanye nezinqubo zokuhlanganisa ekukhiqizeni i-semiconductor. Eklanyelwe ukusebenza ngaphansi kwezimo ezishisayo, lawa mashubhu ayizingxenye ezibalulekile ezinhlelweni zomlilo ezivundlile nezime mpo ezisetshenziswa kumaseli elanga.

Ⅰ.Ukwakheka Okubalulekile

Amashubhu ethu okusabalalisa enziwe kusukela ku-99.995% i-silica ehlanzekile ehlanganisiwe (SiO₂), atholakala kubahlinzeki bempahla eluhlaza bezinga eliphezulu futhi acutshungulwa kusetshenziswa izindlela zobunikazi zokubumba ezishisayo nezindlela zokudonsa. Lokhu kuqinisekisa ukumelana okukhethekile nokushaqeka okushisayo, ukuzinza kwamakhemikhali, kanye nokungcoliswa okuncane kwe-ionic - izici ezibalulekile zokugcina isivuno se-wafer nobuqotho bemishini.

● Impahla: I-High-Purity Synthetic Fused Silica

● Izinga Lokungcola: ≤10 ppm (Ukungcola kwensimbi)

● Isakhiwo Sekristalu: I-Amorphous

Ⅱ.Izicelo Ezibalulekile Ekucubunguleni I-Semiconductor

I-Semixlab's Quartz Diffusion Tubes ibalulekile ezinyathelweni ezibucayi zokwenziwa kwe-semiconductor, idlala indima ebalulekile ekuzuzeni izinto ezibonakalayo ezifiselekayo kanye nokusebenza kwedivayisi:

Izinqubo Zokusabalalisa

Ezithandweni zokusabalalisa, amashubhu ethu asebenza njengegumbi lokusabela lapho ukungcola kwe-dopant (isb, i-boron, i-phosphorus, i-arsenic) yethulwa kuma-wafer we-semiconductor emazingeni okushisa aphezulu. Amashubhu ahlinzeka ngendawo evalwe ngokwe-hermetically, engenakho ukungcola ukuze kulawulwe ngokunembile amaphrofayili e-doping. Ukuzinza kwazo okushisayo kuqinisekisa ukusatshalaliswa kwezinga lokushisa okufanayo, okuholela ekungeneni okungaguquki kwe-dopant nokwenziwa kusebenze, okubalulekile ekuchazeni izici zikagesi zedivayisi.

Izinqubo ze-Oxidation

Ngesikhathi se-oxidation eshisayo, ama-wafers e-silicon achayeka kumoya-mpilo noma kumusi wamanzi emazingeni okushisa aphakeme ngaphakathi kweshubhu le-quartz ukuze kukhule ungqimba oluncane, oluvikelayo lwe-silicon dioxide (SiO₂). Lesi sendlalelo se-SiO₂ sisebenza njengesango le-dielectric, isendlalelo sokuhlukanisa, noma isendlalelo sokudlula. Ukuhlanzeka okuphezulu nokuzinza kwe-dimensional kwamashubhu ethu kubaluleke kakhulu lapha, njengoba kuthinta ngokuqondile ukufana, ukujiya, kanye nekhwalithi kagesi yesendlalelo se-oxide, okuyisisekelo ekusebenzeni kwedivayisi nokuthembeka.

Anealing Izinqubo

I-Annealing isetshenziselwa ukulungisa umonakalo we-crystal lattice obangelwa ukufakwa kwe-ion kanye nokwenza kusebenze ama-dopants afakiwe. Amashubhu ethu e-quartz ahlinzeka ngendawo ehlanzekile nelawulwayo enezinga eliphezulu lokushisa elidingekayo kulezi zinyathelo zokudonsa. Izici ezinhle kakhulu ezishisayo ze-quartz ziqinisekisa ukwelashwa okufanayo kokushisa kuyo yonke iwafa, okuholela ekwehlisweni kokukhubazeka okusebenzayo kanye nokwenza kusebenze i-dopant efanele, okuthuthukisa kakhulu izici zikagesi zedivayisi nokuzinza kwesikhathi eside.