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I-Quartz flange yenqubo ye-semiconductor
Ama-quartz flange ayizici ezakhiwe ngokunemba ezisetshenziswa kabanzi kumishini yenqubo ye-semiconductor. Yenziwe nge-quartz ehlanganisiwe ehlanzekile, ihlinzeka ngokuvaleka okuthembekile, ukuzinza okushisayo okungaphezu kuka-1000 °C, nokumelana okuhle kakhulu namagesi ezinqubo ezibolayo namakhemikhali. Imvelo yabo engenzi lutho inciphisa ubungozi bokungcola, ibenze bafanelekele izinhlelo zokusebenza ze-CVD (Chemical Vapor Deposition), Oxidation, Diffusion, Annealing kanye ne-Etching & Cleaning Process.
Incazelo
Ama-quartz flange abalulekile ezinqubweni ze-semiconductor, ahlinzeke ngokuvala, ukulawula ukugeleza kwegesi, nokuzinza kokushisa.
Izicelo
Iqhaza kanye nokusetshenziswa kwama-Quartz Flanges ekucubunguleni kweSemiconductor
1. Inqubo ye-CVD (Chemical Vapor Deposition).
● Inhloso: Egumbini lokusabela le-CVD, i-quartz flange ivala isixhumi esibonakalayo phakathi kweshubhu le-quartz negumbi lensimbi, iqinisekisa ukugeleza okufanayo kwamagesi enqubo ngaphakathi kwendawo yokusabela kuyilapho ivimbela umoya ukuthi ungangeni futhi ulondoloze indawo ye-vacuum.
●Uhlelo lokusebenza: Ivimbela ukuvuza kwegesi yokubeka, iqinisekisa ukufana kwefilimu kanye nekhwalithi yokubeka. Izinto zequartz ezikwazi ukumelana nezinga lokushisa eliphezulu zingamelana namazinga okushisa enqubo asukela kumakhulu kuya ezinkulungwaneni zamadigri Celsius.
2. Inqubo yesithando somlilo
● Inhloso: I-quartz flange ixhuma ithubhu ye-quartz nesikebhe se-quartz noma isakhiwo sokusekela, idale isikhala esivalekile esidingekayo ukuze kufakwe i-oxidation yezinga eliphezulu lokushisa.
●Uhlelo lokusebenza: Iqinisekisa ukusatshalaliswa okuzinzile komoyampilo noma umhwamuko wamanzi ngaphakathi kwegumbi, ngaleyo ndlela kwakheka isendlalelo se-oxide esilinganayo endaweni eyisicwecwana se-silicon. Ukuzinza okushisayo kwe-quartz flange kuqinisekisa uphawu oluhle ngemijikelezo eminingi yokushisa.
3. Inqubo yesithando sokusabalalisa
●Inhloso: Esithandweni somlilo seshubhu lokusabalalisa, ama-quartz flange asetshenziselwa ukuvikela ishubhu yesithando somlilo futhi kuvalwe igesi yenqubo, okuqinisekisa ukuthi amagesi e-dopant (afana ne-B₂H₆ ne-PH₃) afinyelela kuphela iwafa ngaphakathi kweshubhu.
●Uhlelo lokusebenza: Qinisekisa ukufana phakathi nenqubo yokusabalalisa igesi, uvimbele izingozi zokuphepha ekuvuzeni kwegesi, futhi unciphise ukungcoliswa kwezinhlayiyana.
4. Inqubo Yokuhlanganisa
● Inhloso: Ama-quartz flange aqinisekisa ukungangeni komoya kwegumbi le-annealing, avimbele ukungena komoyampilo wangaphandle noma umswakama, ngaleyo ndlela avimbele ukungcoliswa kanye ne-oxidation engadingekile yendawo eyi-wafer.
●Uhlelo lokusebenza: Ngokuhambisana namagesi angenayo (njenge-N₂ ne-Ar) ezindaweni ezinezinga lokushisa eliphezulu, agcina umoya ohlanzekile phakathi nenqubo yokudonsa, okusiza ukuqeda ukukhubazeka nokuthuthukisa ukusebenza kwe-wafer.
5. Etching & Cleaning Process
● Inhloso: Ama-quartz flange nawo asetshenziselwa ukuvala ikamelo kwezinye izinto ezimanzi noma ezomile zokuhlanza/zokunamathisela.
●Uhlelo lokusebenza: Ukuqinisekisa ukuthi amagesi abolayo noma uketshezi (okufana ne-HCl, NF₃, HF) kusebenza kuphela endaweni ekhethiwe, gwema ukuvuza, inwebe impilo yesisetshenziswa, futhi yehlise ukugqwala ezingxenyeni ezizungezile.
I-Quartz Flange ku-Semiconductor Process - Izinselele nezixazululo
| Izinselele | Solutions | Izinzuzo |
|
I-Thermal Stress & Cracking Imifantu ebangelwa ukuhamba ngebhayisikili okushisayo, incishisiwe impilo yonke |
- Sebenzisa i-high-purity opaque quartz ukuze uhlakaze ingcindezi - Lungiselela ukwakheka kwe-flange nokujiya - Lawula amazinga okushisa/okupholisa |
- Impilo yesevisi eyandisiwe - Ingozi ephansi yokuvuza nokwehluleka ngenxa yokuqhekeka |
|
Ukungcoliswa kwezinhlayiyana Izinhlayiya ezikhipha futhi zingcolise ama-wafers |
- Sebenzisa i-quartz ehlanzekile kakhulu (>99.99% SiO2) - Ukunemba kwendawo yokupholisha - Umklamo wokugeleza kwegesi olungiselelwe - Ukugcinwa njalo nokushintshwa |
- Ukuncipha kwezinhlayiyana ukukhubazeka - Isivuno esithuthukisiwe nokuzinza kwenqubo |
|
I-Chemical Corrosion & Surface Degradation Amagesi agqwalayo enza indawo engaphezulu futhi abe buthakathaka amandla |
- Sebenzisa i-quartz ehlanzekile engagqwali - Ukuvikelwa kwendawo kanye nokushelela okuthuthukisiwe - Ukulawula okuqinile komkhathi wenqubo |
- Ukumelana nokugqwala okuthuthukisiwe - Ukonakala kwendawo okuncishisiwe nokukhiqizwa kwezinhlayiyana - Ukuthembeka kwe-flange yesikhathi eside |
|
Vacuum Ukulahlekelwa Ubuqotho Ukulahleka kokusebenza kokuvala, imvelo yenqubo engazinzile |
-Ukunemba okuphezulu kwemishini yokuvala indawo - Sebenzisa ama-O-rings amelana nokushisa okuphezulu - Ukuhlolwa okujwayelekile kokuvuza kwe-helium |
- Igcinwe ubumsulwa begumbi - Inqubo ephakeme yokuphindaphinda nokufana kwefilimu - Yehlisiwe ingozi yesondlo |
Ngokuhlanganisa ukuhlanzeka okuphezulu, ukunemba kwe-dimensional, nokuqina kwesikhathi eside, i-Semixlab quartz flanges iqinisekisa izimo zenqubo ezinzile kanye nekhwalithi ye-wafer engashintshi. Ukusebenzisa kwabo kunomthelela ekwandiseni isikhathi sokusebenza kwemishini, ukunciphisa imvamisa yokulungisa, kanye nokwethenjwa okuthuthukisiwe kuzo zonke izinyathelo ezibalulekile zokukhiqiza i-semiconductor. I-Semixlab inikeza izixazululo ezithuthukisiwe ezine-quartz ehlanzekile kakhulu, imiklamo ethuthukisiwe, nokubekwa uphawu okunembayo ukuze kuqinisekiswe ukwethembeka kwesikhathi eside, amaphutha ancishisiwe, kanye nesivuno se-wafer esithuthukisiwe. Sibheke phambili ekubonisaneni kwakho okuqhubekayo nokubambisana.
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