I-SiC Ceramics

I-SiC ceramics isetshenziswa kakhulu emishinini ye-semiconductor, ikakhulukazi ngoba ibambelela kangcono ezimweni ezinzima. Lapho izinga lokushisa liphakama noma inqubo iba namandla kakhulu, izinto ezifana ne-quartz noma i-silicon zingaqala ukubonisa imikhawulo, futhi ngokuvamile yilapho i-SiC ingena khona. Ezinqubweni zesithando ezifana ne-oxidation noma ukusabalala, izingxenye ezifana nezikebhe ze-wafer noma ama-paddle ezenziwe nge-SiC zivame ukuhlala isikhathi eside. Zigcina isimo sazo futhi azilethi ukungcola okuningi, ngisho nangemva kokugijima isikhathi eside. Abantu bavame ukushintsha kusuka ku-quartz ngenxa yalesi sizathu, ikakhulukazi lapho ukulungiswa kuba njalo kakhulu.

Ukuze kuqoshwe, i-SiC ivame ukukhethwa ngoba nje isinda i-plasma isikhathi eside. Umehluko wokuphila uma uqhathaniswa nezingxenye ze-silicon uyabonakala kumasethingi amaningi, yize kusancike enkambisweni eqondile. Iphinde isize kancane ngokulawula izinhlayiya, okuba bucayi kakhulu njengoba ama-node encipha. Uzobona ne-SiC isetshenziswa njenge-susceptors ku-MOCVD noma i-CVD. Kulezo zimo, akukhulunywa kakhulu “ngamandla” kodwa kukhulunywa kakhulu ngokugcina ukuziphatha kokushisa kuzinzile. Ngaphandle kwalokho, ibonakala ezingxenyeni zegumbi njenge-liners noma ama-showerheads, futhi ngezinye izikhathi nasekuphatheni izingxenye.