Izindandatho Zokuvala I-Graphite Eziyi-Isostatic Zisekela Kanjani Izinqubo Zokukhiqiza Eziqinile Ze-Semiconductor?

Ekukhiqizweni kwe-semiconductor, ukugcina izinqubo ezizinzile kuhlale kuyinselele ngoba ngisho nezinguquko ezincane ekushiseni, ekucindezelweni, noma ekuvezweni ngamakhemikhali kungathinta ikhwalithi ye-wafer kanye nemikhiqizo. Amasongo okuvala i-graphite a-isostatic asiza ukuxazulula le nkinga ngokunikeza uphawu oluthembekile, olushisa kakhulu ezindaweni ezigqwalisayo. Amelana nokuguguleka nokuguqulwa, agcina amagesi, uketshezi, kanye nezinhlelo ze-vacuum ezithandweni noma kuma-reactor aqukethwe. Lokhu kuqinisekisa ukuthi imishini isebenza kahle ngaphandle kokuvuza noma ukuphazamiseka. Konjiniyela kanye nochwepheshe, ukwazi ukuthi la songo okuvala asebenza kanjani kubalulekile ekugcineni ukukhiqizwa okuqhubekayo kanye nokunciphisa isikhathi sokungasebenzi esibizayo.

Izidingo zokuvala uphawu ezindaweni ze-epitaxy, CVD, kanye nokusabalalisa

Ekukhiqizweni kwe-semiconductor, izinqubo ezahlukene zibeka izidingo eziqondile kakhulu ezingxenyeni zokuvala ngoba izivalo ezivamile zingahluleka ngokushesha ngaphansi kwezimo ezimbi kakhulu. Kuma-reactor epitaxy, isibonelo, ama-wafer abonakala emazingeni okushisa aphezulu kanye namagesi asabelayo, futhi ngisho nokuvuza okuncane kungavumela ukungcola ukuthi kungene, konakalisa izendlalelo ezibucayi zekristalu ezikhuliswayo. Amasongo okuvala kule ndawo kumele agcine isithiyo esiqinile ngenkathi ebhekene nokujikeleza kokushisa kanye nokuhlaselwa ngamakhemikhali. Ukufakwa komusi wamakhemikhali, noma I-CVD , iveza izinselele ezifanayo kodwa ngokugxila okwengeziwe ekumelaneni nokugqwala. Amagesi angaphambili asetshenziswayo angaba nolaka kakhulu, futhi izinqubo zivame ukusebenza ngaphansi komfutho ophezulu, ngakho-ke izivalo ezithambile noma eziqhekekayo zingaholela ekuphazamisekeni kokumboza, izinqubo ezingazinzile, noma isikhathi sokungasebenzi esingahleliwe. Izindandatho zokuvala ze-graphite ezi-isostatic zivame ukukhethwa kulezi zinhlelo zokusebenza ngoba zigcina isimo sazo, zimelana nokuguguleka kwamakhemikhali, futhi zingabhekana nokushintsha kwengcindezi okungazelelwe ngaphandle kokwehluleka. Izitofu zokusabalalisa zithembele ekuvalelweni okunembile ukulawula ukugeleza kwegesi nokugcina ubuqotho be-vacuum, ngoba ngisho nokuvuza okuncane kungashintsha ukugcwala kwe-dopant kuma-wafer futhi kuthinte izakhiwo zawo zikagesi. Izindandatho ze-Graphite Zisebenza kahle lapha ngoba zimelana nemijikelezo yokushisa nokupholisa ephindaphindwayo ngaphandle kokuguquka, futhi ubuningi bazo obufanayo buqinisekisa amazinga ahambisanayo e-vacuum ngesikhathi sokukhiqiza isikhathi eside. Kuzo zonke izinqubo ze-epitaxy, i-CVD, kanye nokusabalalisa, umgomo ukuvimbela ukungcola, ukugcina ingcindezi ezinzile kanye nokwakheka kwegesi, kanye nokunciphisa ukuphazamiseka kokulungisa. Ukusebenzisa izinto zokuvala ezifanele, njenge-graphite, kuvumela onjiniyela ukuthi bagcine umkhiqizo uthembekile, bavikele ikhwalithi ye-wafer, futhi bagweme isikhathi sokuphumula esibizayo, futhi ukuqonda izidingo ezihlukile zenqubo ngayinye kusiza ukukhetha ikhambi lokuvala elisebenza kahle kakhulu.

Izinzuzo zesakhiwo se-graphite esishintshashintshayo sokujikeleza kokushisa

Ukujikeleza kwe-thermal kuyinselele enkulu emishinini ye-semiconductor ngoba izitofu nama-reactor ashisa aze afike emazingeni okushisa aphezulu kakhulu bese ephola ngokuphindaphindiwe ngesikhathi sokukhiqiza. Izinto eziningi ziyanda, zinciphe, noma ziqhekeke ngaphansi kwalezi zimo, okuholela ekuvuza noma ekungahambelani kahle. I-graphite e-isostatic iphatha lokhu kucindezeleka kangcono kakhulu kunezinsimbi noma i-ceramics ejwayelekile ngenxa yobuningi bayo obufanayo kanye nesakhiwo sayo sezinhlamvu ezincane, okwenza kube lula ukugoba noma ukuthuthukisa izindawo ezibuthakathaka lapho amazinga okushisa eshintsha ngokushesha. Lesi sakhiwo siphinde sisakaze ukucindezeleka ngokulinganayo kuyo yonke indandatho yokuvala, ngakho-ke ezithandweni noma emakamelweni e-CVD lapho ukushisa kungavamile ukufana, i-graphite iyashintshashintsha ngaphandle kokulahlekelwa uphawu lwayo. Lokho kuzinza kugcina amagesi nezimo ze-vacuum zihambisana, okubalulekile ekugcineni ikhwalithi ye-wafer. Amasongo e-graphite nawo agcina izakhiwo zawo zemishini ngisho nangemva kwamakhulu emijikelezo yokushisa nokupholisa, egcina ukuma, ubuningi, kanye nokusebenza kokuvala ngokuhamba kwesikhathi. Ubuso bayo obufanayo buyasiza ekumelaneni nokuhlaselwa ngamakhemikhali, kuvimbele amagesi aqothulayo noma uketshezi ekudaleni umonakalo. Ngenxa yalezi zakhiwo, i-graphite e-isostatic ivame ukusetshenziswa ezinqubweni ze-epitaxy, diffusion, kanye ne-CVD lapho ukujikeleza kwe-thermal kuyinto evamile. Ochwepheshe bathola ukuthi uma sezifakiwe kahle, izindandatho ze-graphite zinciphisa isidingo sokuqapha njalo, ukulungisa, noma ukushintsha, okuvumela ukuthi zigxile ekwenzeni ngcono izinqubo kunokuxazulula izinkinga zokwehluleka kwemishini. Lokhu kuhlanganiswa kokuqina kokushisa, ukumelana namakhemikhali, kanye nokuqina kwenza i-graphite ibe ukukhetha okuthembekile kakhulu kwezicelo ze-semiconductor zokushisa okuphezulu.

Ukulawulwa kokungcola kanye nokunciphisa izinhlayiya kuma-node athuthukile

Ekukhiqizweni kwe-semiconductor okuthuthukisiwe, ngisho nezinhlayiya ezincane kakhulu zingalimaza i-wafer, ikakhulukazi njengoba ubukhulu besici buncipha futhi izinqubo ziba bucayi kakhulu ekungcoleni. Izingxenye zokuvala zibalulekile ekugcineni indawo ihlanzekile, futhi izindandatho zokuvala ze-graphite zidlala indima ebalulekile kulokhu. Ngokungafani nezinye izinsimbi noma izimbobo ezithambile, i-graphite ye-isostatic ayiqhekeki noma ikhiqize izinhlayiya ngaphansi kokucindezeleka, okwenza ifaneleke kakhulu ezimweni zegumbi lokuhlanza. Ngesikhathi sezinqubo ezifana ne-CVD, i-epitaxy, noma ukusabalala, ukugeleza kwegesi okuqhubekayo kubalulekile, futhi noma yikuphi ukwehluleka kwesimbozo noma ukuwohloka kungavumela izinhlayiya ezivela emishinini ukuthi zingene ekamelweni, okungabangela amaphutha noma ukwehluleka kukagesi kuma-chips aqediwe. Izindandatho ze-graphite zigcina ubuqotho bazo bomphezulu ngisho nangaphansi kokujikeleza okuphindaphindiwe kokushisa kanye nokuvezwa kwamakhemikhali, kunciphisa ingozi yokuchitheka noma ukungcola. Esinye isici esibalulekile ukukhipha igesi. Ezinye izinto zikhipha amagesi lapho zishiswa ezingasabela ngamagesi enqubo futhi zidale imikhiqizo engafuneki, kodwa i-graphite ye-isostatic inokukhipha igesi okuncane, igcina umoya wegumbi uzinzile futhi inciphisa amaphutha. Ochwepheshe nabo bayazuza ekusebenzeni okuvamile kanye nokugcinwa kwesikhathi eside, njengoba izimbobo ze-graphite zidinga ukushintshwa okuncane, kunciphisa ingozi yokungcola ngesikhathi sesevisi. Zihlinzeka ngokuvala okuhlala njalo emijikelezweni eminingi yenqubo, zigcina ukwakheka kwegesi kanye nokucindezela kuzinzile. Kwabasebenza kuma-node athuthukile, ukukhetha izinto zokuvala ezifanele kubalulekile ekulawuleni ukungcola, ukuvikela ikhwalithi ye-wafer, kanye nokuqinisekisa isivuno esikhulu ezindaweni zokukhiqiza ezizwela kakhulu.

Ukuqhathaniswa nezixazululo zokuvala zensimbi neze-ceramic

Lapho bekhetha izindandatho zokuvala zemishini ye-semiconductor, onjiniyela bavame ukulinganisa amandla nobuthakathaka bezinketho ze-graphite, insimbi, kanye ne-ceramic. Izimbozo zensimbi, njengezinsimbi zensimbi engagqwali noma i-nickel, ziqinile futhi zisingatha ingcindezi kahle, kodwa ziyanda futhi zinciphe ngokushintsha kwezinga lokushisa. Ezinqubweni zokushisa nokupholisa okuphindaphindiwe, lokhu kungaholela ekuvuzeni noma ekungalungi kahle. Izinsimbi zingaphinde ziguge lapho zivezwa kumagesi asabelayo, zinciphise isikhathi sazo sokuphila futhi zingase zingenise ukungcola. Izimbozo ze-ceramic ziqinile kakhulu futhi zimelana namakhemikhali, okwenza zibe usizo ezindaweni ezigqwalisayo. Zingamelana namazinga okushisa aphezulu ngaphandle kokuthamba, kodwa ziyaqhekeka futhi zithambekele ekuqhekekeni uma zivezwa ekushaqekeni, ekungalungi kahle, noma ekucindezelweni okungalingani. Izimbozo ze-ceramic nazo zibekezelela ukujikeleza kokushisa ngendlela engaphumeleli, okungaba yinkinga kuma-oven noma kuma-reactor lapho amazinga okushisa eshintshashintsha khona njalo. Nokho, i-graphite ye-isostatic ihlanganisa izimfanelo ezinhle kakhulu zezinsimbi kanye ne-ceramics. Imelana nokuhlaselwa kwamakhemikhali njenge-ceramics kodwa ayiqhekeki kakhulu, ivumela ukuthi imelane nokushaqeka kanye nokucindezela okungalingani. Isakhiwo sayo siphatha ukujikeleza kokushisa kangcono kakhulu kunezinsimbi noma izimbozo ze-ceramics ezijwayelekile, zihlala zizinzile phakathi kwamakhulu emijikelezo yokushisa nokupholisa. I-Graphite ayigqwali futhi ayinawo ugesi omningi, okusiza ukugcina ama-wafers engenakungcola. Ngenxa yalokho, izindandatho zokuvala i-graphite zivame ukuhlala isikhathi eside, zidinga ukulungiswa okuncane, futhi zigcina ukuvalwa okuqinile ezindaweni ezidinga kakhulu. Nakuba izinsimbi noma izinto zobumba zingase zifaneleke ekusetshenzisweni okunengozi ephansi, i-graphite ngokuvamile iyindlela ekhethwayo ekukhiqizweni kwe-semiconductor okuthuthukisiwe lapho ubuqotho be-vacuum, ukuzinza kwenqubo, kanye nezimo ezingenazinhlayiya kubalulekile.