Kungani Amapuleti Okusekela Anezimbobo Ezimbozwe Nge-TaC Eletha Ukuqina Okuphezulu Kwe-Plasma Ezinqubweni Ezinamandla Aphezulu

Ezinqubweni ze-plasma ezinamandla aphezulu, izingxenye ezingaphakathi kwegumbi zidlula ezimweni ezinzima kakhulu. Amapuleti okusekela ama-pedestal agcina ama-wafer endaweni yawo, ngakho-ke uma eguga ngokushesha kungabangela imiphumela engalingani, ukungcola, kanye nesikhathi esibizayo sokungasebenzi. Amapuleti okusekela ama-pedestal ambozwe yi-TaC asiza ukuxazulula le nkinga. Ubuso bawo obuqinile nobumelana namakhemikhali buhlala isikhathi eside kakhulu ezindaweni ezinzima ze-plasma kunezinto ezijwayelekile. Ukwazi ukuthi lezi zingubo zisebenza kanjani kusiza onjiniyela kanye nochwepheshe ukuthi bagcine izinhlelo zabo zisebenza kahle futhi zithembekile.

Indlela i-TaC Coating Ethuthukisa Ngayo Ukuqina Kokushisa kanye Ne-Plasma

Amapuleti okusekela ama-pedestal asetshenziswa emakamelweni e-plasma asebenza ezindaweni ezibucayi kakhulu lapho ehlaselwa khona ama-ion anamandla aphezulu, avulelwe amagesi asabelayo, futhi ashiswa amazinga okushisa aphezulu kakhulu isikhathi eside. Ngokuhamba kwesikhathi lezi zimo ezinzima zingalimaza amapuleti enziwe ngezinto ezijwayelekile, okuholela ekugugulekeni, ekuqhekekeni, nasekugugeni kwendawo okuthinta ukucutshungulwa kwe-wafer futhi kwandise isikhathi sokungasebenzi. I-TaC coating kuthuthukisa kakhulu ukuqina kwala mapuleti ngokudala indawo eqinile nemelana nokushisa evikela izinto eziyisisekelo. Inzuzo eyodwa ebalulekile ye-TaC ukuzinza kwayo okuhle kakhulu kokushisa, okuvumela ipuleti ukuthi liphathe ukushisa nokupholisa okusheshayo ngaphandle kokugoba noma ukuqhekeka. Lokhu kuzinza kubaluleke kakhulu ngoba ngisho nezinguquko ezincane esimweni zingathinta ukuhambisana kwe-wafer, ukufana kokucubungula, kanye nekhwalithi yomkhiqizo iyonke. I-TaC iphinde inikeze ukumelana okuqinile ekuhlaselweni kwe-plasma. Ama-ion asebenzayo kanye nama-radicals avame ukudla izindawo ezingavikelekile avinjelwa ungqimba lwe-TaC, olusiza ekuvimbeleni ukuguguleka futhi lunciphise ukukhiqizwa kwezinhlayiya ezingangcolisa ama-wafer. Ngenxa yalokhu kuvikelwa, amapuleti ambozwe yi-TaC adinga ukuhlanzwa nokufakwa njalo, okusindisa isikhathi kanye nezindleko zokusebenza. Ezindaweni zokukhiqiza ze-semiconductor zangempela, la mapuleti ambozwe abonise impilo yesevisi ende kakhulu kanye nokusebenza okuzinzile ngisho nangaphansi kwamandla aphezulu kanye nezimo zenqubo enamandla. Sekukonke, amapuleti okusekela e-TaC ambozwe yi-TaC asiza ukugcina ukucubungula okuqhubekayo, ukunciphisa izidingo zokulungisa, futhi asekele ukukhiqizwa okubushelelezi nokuthembekile ezinhlelweni ze-plasma ezinamandla aphezulu.

Izicelo Ezibalulekile Zezakhiwo Ezimbozwe yi-TaC Emakamelweni Okuqopha Nokuqopha

Izakhiwo ezimbozwe nge-TaC ezifana namapuleti okusekela ama-pedestal, ama-liners, kanye nezihlangu zibaluleke kakhulu kokubili emakamelweni okugcaba kanye nawokubeka ngoba lezi zindawo zinzima kakhulu. Izingxenye zivezwa ku-plasma enamandla, amazinga okushisa aphezulu kakhulu, kanye namagesi asabelayo angalimaza ngokushesha izingxenye zensimbi noma ze-ceramic ezingavikelekile. Lapho izingxenye ziguga, zingadala izinhlayiya, zishise ngokungalingani, noma zilahlekelwe ukuzinza, konke okunciphisa ikhwalithi ye-wafer kanye nokukhiqizwa okuhamba kancane. Emakamelweni okugcaba, amapuleti ambozwe nge-TaC asiza ukugcina i-plasma ifana ngokumelana nokuqhuma kwe-ion okuvame ukuguguleka ubuso. Lokhu kusiza ukuvimbela ukwakheka kwezinhlayiya kanye nokusatshalaliswa kwamandla okungalingani, okubaluleke kakhulu ekuphatheni okunembile kwe-nanoscale. Ngenxa yalokho, ama-wafer agcaba ngokulinganayo futhi ukulungiswa kungenziwa kaningi. Emakamelweni okubeka asetshenziselwa izinqubo ezifana ne-CVD noma i-ALD, I-TaC coatings vikela amapuleti ekuhlaselweni ngamakhemikhali kanye nokulimala kokushisa. Lokhu kuvumela amapuleti ukuthi ahlale eqinile ngesikhathi sokuhamba isikhathi eside kanye nokushintsha kwezinga lokushisa okusheshayo, okusiza amafilimu amancane ukuthi akhule ngokulinganayo kuyo yonke i-wafer. Ama-fabs amaningi abika ukuthi izingxenye ezimbozwe yi-TaC zihlala isikhathi eside, zidinga ukulungiswa okuncane, futhi zihlala zihlanzekile ngesikhathi sokusebenza. Sekukonke, inhlanganisela yokuqina kokushisa, ukumelana ne-plasma, kanye nokuqina kwamakhemikhali kwenza izingxenye ezimbozwe yi-TaC zibe yisinqumo esithembekile sokugcina izinqubo ezizinzile, ukunciphisa isikhathi sokungasebenzi, kanye nokusekela ukukhiqizwa kwe-wafer esezingeni eliphezulu okuqhubekayo.