I-CVD Tantalum Carbide (TaC) Coating

Ukumbozwa kwe-TaC kuvame ukucatshangelwa lapho i-SiC iqala ukufinyelela imikhawulo yayo. Lokhu kwenzeka kaningi ekukhuleni kwe-SiC epitaxy noma i-crystal, lapho kokubili izinga lokushisa kanye nomoya wenqubo kudinga kakhulu.

Njengoba inezinga lokuncibilika eliphakeme kakhulu, i-TaC iphatha kangcono ukuvezwa isikhathi eside ekushiseni okuphezulu, ikakhulukazi ezindaweni ezine-hydrogen noma i-HCl. Empeleni, lokhu kwenza umehluko ezinqubweni ezifana nokukhula kwe-PVT, lapho ukuzinza kokushisa kuthinta ngqo ikhwalithi yekristalu.

Izicelo ezijwayelekile zifaka phakathi amasongo okuqondisa ukugeleza, izibambi zembewu, izingxenye ezihlobene nokubethelwa, kanye nezinye izakhiwo ngaphakathi kwensimu yokushisa. Lezi zingxenye zivezwa ezimweni ezinzima isikhathi eside, ngakho-ke ukunciphisa ukuwohloka kuba kubalulekile. Kwezinye izilungiselelo, i-TaC kancane kancane ithatha indawo yezinto ezindala njenge-pBN, ngisho nezinye izingxenye ezimbozwe yi-SiC, yize lokhu kusancike ezindleleni nasekwakheni kwenqubo.