I-SiC Coated Graphite Susceptor

I-SiC (Silicon Carbide) ehlanganiswe nge-graphite susceptor iyingxenye ebalulekile yokukhiqiza i-semiconductor, ikakhulukazi ekufuneni izicelo ezisezingeni lokushisa eliphezulu njenge-epitaxial deposition kanye ne-MOCVD (Metal-Organic Chemical Vapor Deposition).

Lawa ma-susceptors aklanyelwe ukubamba futhi ashise amawafa e-silicon anembayo, aqinisekisa ukusatshalaliswa kwezinga lokushisa okufanayo kanye nemvelo yenqubo ehlanzekile. Ama-susceptors ethu abalulekile ekukhiqizeni amafilimu amancane asezingeni eliphezulu, afanayo ayisisekelo samadivayisi athembekile futhi asebenza kahle kakhulu e-semiconductor.

Ⅰ. Izinto Ezibalulekile Nezakhi Ezimqoka

Ama-susceptors ethu akhiwe ngobuchule kusetshenziswa i-high pure graphite core kanye nongqimba oluvikelayo lwe-Silicon Carbide (SiC).

I-High-Purity Graphite: I-graphite substrate inikeza ubuqotho besakhiwo esiyinhloko kanye nokusebenza okushisayo. Ukuzinza kwayo okuhle kakhulu kokushisa kuyivumela ukuthi isebenze emazingeni okushisa aphakeme kakhulu ngaphandle kokuguqulwa. Ukushisa okuphansi kwe-graphite kwenza ukushisisa nokupholisa okusheshayo nangempumelelo, okubalulekile ezikhathini zomjikelezo osheshayo endaweni yokukhiqiza.

I-Silicon Carbide (SiC) Coating: I-SiC coating isetshenziswa ku-graphite ngenqubo ye-CVD (Chemical Vapor Deposition). Lokhu kudala indawo eminyene, engenazimbotshana eqinile kakhulu futhi engasebenzi ngamakhemikhali. I-SiC inikeza ukumelana okuphezulu nokuguguleka kwe-plasma kanye nokuhlaselwa okuvela kumagesi enqubo anolaka, ukuvimbela ukungcola nokukhiqizwa kwezinhlayiyana. Lokhu kuqinisekisa inqubo ehlanzekile, kwandisa ukuphila kwengxenye, futhi kuvikela i-graphite engaphansi emonakalweni.

Ⅱ. Izinzuzo Ezisebenzayo Ekwenziweni Kwe-Wafer

I-SiC yethu ehlanganiswe ne-graphite susceptors idlala indima ebalulekile ekuqinisekiseni ikhwalithi nokusebenza kahle kokwenziwa kwe-semiconductor.

● I-Thermal Uniformity Engenakuqhathaniswa: Idizayini ye-susceptor, ehlanganiswe nezici ezishisayo ze-SiC ne-graphite, iqinisekisa ukuthi ukushisa kusakazwa ngokulinganayo kuyo yonke indawo eyi-wafer. Lokhu kubalulekile ukuze kuzuzwe ukujiya kwefilimu efanayo kanye nezakhiwo zempahla ezingaguquki, okuwukhiye wokukhiqiza okuphezulu kwedivayisi.

● I-Superior Contamination Control: I-SiC engenazimbobo namakhemikhali angenayo i-SiC ivimbela ukuphuma nokuchithwa kwezinhlayiyana ku-graphite substrate. Lokhu kunciphisa kakhulu ubungozi bokungcoliswa kwe-wafer kanye nokukhubazeka, okuyinselelo evamile ezinqubweni zokushisa okuphezulu.

● Ukuqina Nokuphila Okuthuthukisiwe: Inamathela eqinile ye-SiC isebenza njengesihlangu esivikelayo ezintweni ezilimazayo nezibolayo, enweba ngokuphawulekayo isikhathi sokusebenza kwesixhumi. Lokhu kunciphisa imvamisa yokushintsha futhi kwehlisa izindleko zokulungisa zizonke.

● Ukuphindwa Kwenqubo Ephakeme: Ngokuhlinzeka ngendawo ezinzile futhi engaguquki eshisayo namakhemikhali, ama-susceptors ethu avumela izinqubo eziphindaphindwayo kakhulu. Lokhu kuvumelana kubalulekile ekukhiqizeni ngezinga elikhulu amadivaysi athembekile e-semiconductor.

Kwa-Semixlab, sizibophezele ekuhlinzekeni imboni ye-semiconductor ngezingxenye zeprimiyamu kanye nensizakalo Yokwenza Ngokwezifiso engenakuqhathaniswa. Sinikezela ngedizayini yangokwezifiso ephelele kanye nokukhiqizwa kwama-SiC ethu ahlanganiswe ngama-graphite susceptors. Ithimba lethu lonjiniyela lingasebenzisana nawe ukuze udale i-susceptor efana ngokuphelele nokucaciswa kwemishini yakho kanye nezidingo zenqubo ehlukile.