Ithreyi ye-TaC Ehlanganisiwe Yomoya engu-8 intshi ye-SiC Epitaxy

Ithreyi ye-TaC Coated Air Float engama-intshi angu-8 iyingxenye ebalulekile ezinqubweni ze-epitaxy ze-SiC ezinamanzi amaningi, eklanyelwe ukusekela nokuthutha amawafa e-silicon carbide phakathi nokukhula kwe-epitaxial. Esimweni esinzima se-SiC epitaxy furnaces, amathreyi kufanele amelane nezinga lokushisa eliphakeme kakhulu, amagesi abolayo, nemijikelezo emide yokucubungula. Ngokuhlanganisa i-CVD TaC enamathelayo ne-high-purity graphite substrates, leli threyi le-air float liqinisekisa ukuqina okuphakeme, ukuqina okushisayo, kanye nenqubo efanayo—okuyenza ibe yinto ebalulekile ekukhiqizeni i-SiC wafer yevolumu ephezulu.

Ⅰ. Ukubunjwa Kokubalulekile kanye Nezakhiwo Zomzimba

I-TaC Coated Air Float Tray ihlanganisa izinto ezithuthukisiwe ukuze kuzuzwe kokubili ukuqina kwemishini kanye nokumelana namakhemikhali okudingekayo ku-semiconductor epitaxy:

● I-Substrate Material: I-high-purity graphite susceptor (okuqukethwe kokungcola okuphansi kakhulu, ukuqhutshwa kokushisa okuphezulu)

● Isendlalelo Sokuvikela Sobuso: I-CVD TaC Coating (Tantalum Carbide) isetshenziswa kusetshenziswa umhwamuko wamakhemikhali ukuze kuguge ngokwedlulele kanye nokumelana nokugqwala.

Izici Zomzimba Ezibalulekile:

I-TaC Coating Purity: ≥ 99.99%

Ukuqina (HK): ~2000 HK

Indawo Encibilikayo: ~3,880 °C

I-Thermal Conductivity: Kuhle kakhulu, kuqinisekisa ukushisa kwe-wafer efanayo

Ukumelana ne-Halogen Corrosion: Ukuzinza okuvelele ezindaweni ze-epitaxial ezicebile nge-chlorine ne-fluorine

Ukuminyana kwe-Base Graphite: ~1.85–1.95 g/cm³

Izinga Lokushisa Lokusebenza: Kufika ku-2,000 °C ezindaweni ezilawulwayo

Lezi zakhiwo ziqinisekisa ukuthi i-TaC Coated Tray engu-8 intshi ingakwazi ukumelana nokugijima okude kwe-epitaxial kuyilapho inciphisa ukukhiqizwa kwezinhlayiyana nokungcoliswa kwe-wafer.

Ⅱ. Imisebenzi Esemqoka ku-SiC Epitaxy

Ithreyi yethu engu-8-intshi ye-TaC Coated idlala indima ebalulekile kunqubo ye-epitaxy ye-semiconductor SiC ngokwenza imisebenzi embalwa ebalulekile:

●Ukusabalalisa Kwezinga Lokushisa Okufanayo: I-thermal conductivity ephezulu ye-graphite substrate kanye ne-TaC coating iqinisekisa ukudluliswa kokushisa okuhle kakhulu kanye nezinga lokushisa elifanayo kuwo wonke amawafa e-SiC. Lokhu kufana kubalulekile ukuze kuzuzwe ukujiya kongqimba lwe-epitaxial okungaguquki kanye ne-morphology.

●Ukuvikeleka Ekuqhanyeni Nokungcoliswa: Injoloba ye-TaC engasebenzi ngamakhemikhali ivimbela ngempumelelo i-graphite substrate ukuthi ingasabeli namagesi angaphambili, angabangela ukuchotshozwa futhi akhiphe ukungcola. Lesi sivikelo siyisihluthulelo sokugcina indawo yenqubo ehlanzekile kanye nokuqinisekisa isivuno esikhulu se-wafer.

● Ubude bempilo obunwetshiwe: Ukunamathela kwe-TaC okuqinile kwandisa kakhulu isikhathi sokuphila se-susceptor ngokuvikela i-graphite ekugugeni nasekuwohlokeni kwamakhemikhali, kuncishiswe imvamisa yokushintshwa kanye nokwehlisa izindleko zokusebenza.

●Idizayini ye-Air Float: Idizayini eyingqayizivele yokuntanta emoyeni inciphisa ukuthintana ngokomzimba phakathi kwe-susceptor negumbi, inciphisa ukungqubuzana futhi ivimbele ukukhiqizwa kwezinhlayiyana ezingase zingcolise amawafa. Lo mklamo yingakho waziwa nangokuthi i-TaC Coated Air Float Tray.

Izinzuzo ze-Semixlab

Kwa-Semixlab, sidlulela ngale kwemikhiqizo ejwayelekile ukuze sikunikeze izixazululo ezifanelana nezidingo ezithile zenqubo yakho ye-epitaxy.

●Ukwenza ngokwezifiso: Sinikeza izinketho eziphelele zokwenza ngokwezifiso, okuhlanganisa ukubunjwa okuhlukene, osayizi, nogqinsi lokumboza, ukuze kufane kahle nokucaciswa kwe-reactor yakho kanye nezidingo zenqubo.

●Ukubonisana Kochwepheshe: Ithimba lethu lonjiniyela abanolwazi lihlinzeka ngosekelo olujulile lwezobuchwepheshe kanye nokubonisana, likusiza ukuthi uthuthukise inqubo yakho futhi uhlanganise imikhiqizo yethu kalula.

●Ukuhlola Ukuthunyelwa Kwangaphambi Kokuthunyelwa Okuqinile: Wonke amapuleti e-TaC Coated ahlolwa isimo esibucayi ngaphambi kokuba athunyelwe. Siqinisekisa ukusebenza kwayo nobuqotho ngaphansi kwamazinga okushisa aphezulu nasezindaweni ezinolaka lwamakhemikhali ukuze siqinisekise ukuthi izohlangabezana nezidingo zakho zokusebenza ezidingekayo.