Ipuleti lekhava le-graphite eline-TaC

I-TaC (Tantalum Carbide) ikhava ye-graphite cover plate yakhelwe ngenkani izinqubo zokukhiqiza i-semiconductor, okuhlanganisa i-MOCVD (Metal-Organic Chemical Vapor Deposition) kanye ne-plasma etching. Le ngxenye ebalulekile iklanyelwe ukusebenza njengesivikelo sokuvikela ngaphakathi kwamagumbi okucubungula. Indima yayo eyinhloko ukuvikela izingxenye zangaphakathi ezibalulekile kumagesi anokhahlo, ezonakalisayo kanye ne-plasma enamandla amakhulu, kuyilapho futhi kusiza ukulawula ukugeleza kwamagesi ezinqubo ezisebenzayo. Ngokuqinisekisa indawo ezinzile nehlanzekile, amakhava amapuleti ethu abalulekile ekwandiseni ubude besikhathi semishini nokuthuthukisa isivuno senqubo.

Ⅰ. Izinto Ezibalulekile kanye Nezakhiwo Eziphakeme

Izingqwembe zethu zokumboza zakhiwe ngobuchule kusetshenziswa i-high-purity graphite substrate, eqiniswe ngongqimba oluminyene lwe-Tantalum Carbide (TaC).

I-High-Purity Graphite: I-graphite core inikeza ubuqotho besakhiwo kanye nokuqina kokushisa okudingekayo ezimweni zokusebenza ezimbi kakhulu. Ukuzinza kwayo okuhle kakhulu kokushisa kanye ne-coefficient ephansi yokwandisa okushisayo kuvimbela ukulwa nokuguquka emazingeni okushisa aphezulu. Njengempahla engasindi kodwa eqinile, inciphisa isisindo sokushisa, ivumele ukufudumeza okusebenzayo nokupholisa imijikelezo.

I-Tantalum Carbide (TaC) Coating: Ukufakwa kwe-TaC kuyisihluthulelo sokusebenza okuphezulu kwengxenye. I-Tantalum Carbide iyi-ceramic ephikisayo eyaziwa ngobulukhuni bayo obedlulele kanye nokungangeni kwamakhemikhali okukhethekile. Lokhu kunamathela kusebenza njengesihlangu esiqinile, esinikeza ukumelana okuvelele ku-plasma enolaka kanye nokusabela kwamakhemikhali okubolayo. Kubaluleke kakhulu ekuvimbeleni ukukhiqizwa kwezinhlayiyana nokungcoliswa, okuyizinkinga ezivamile ezindaweni zamagumbi ahlanzekile.

Ⅱ. Imisebenzi Ebalulekile Kuzinqubo Ze-Semiconductor

Amapuleti ethu ekhava e-graphite ahlanganiswe ne-TaC enza imisebenzi eminingana ebalulekile ebalulekile ekwenziweni ngempumelelo kwe-semiconductor.

● Ukulawula Ukungcola: Indawo ye-TaC engenazimbobo futhi engasebenzi ngamakhemikhali idala umgoqo ophelele, ovimbela i-graphite engaphansi ukuthi ingasabeli ngamagesi enqubo kanye nokuphuma komoya. Lokhu kunciphisa kakhulu ubungozi bokungcoliswa kwezinhlayiya kanye nokukhubazeka kwe-wafer, okubalulekile ekuzuzeni umkhiqizo ophezulu wedivayisi.

● Ukuvikelwa Kwezisetshenziswa: Ipuleti lekhava lisebenza njengesendlalelo somhlatshelo esimunca umthelela wezinqubo ezinolaka zamakhemikhali kanye ne-plasma. Lokhu kuvikela izingxenye ezizwelayo kakhulu nezimba eqolo ngaphakathi kwegumbi le-reactor—njengezindonga zegumbi nezinto zokushisisa—ekugugulekeni nasekulimaleni, ngaleyo ndlela kwelule impilo yonke yezinto zokusebenza.

●Inqubo yokuphatha igesi: Idizayini nokubekwa kwe-cover plate kuklanyelwe ukusiza ukuqukatha nokuqondisa ukugeleza kwamagesi asebenzayo. Lokhu kugeleza kwegesi okulawulwayo kubalulekile ukuze kuqinisekiswe ukubekwa kwefilimu okufanayo noma ukucushwa okunembile kuyo yonke indawo eyiwafa, okunikela ekucubunguleni ukuphindaphinda nokungaguquguquki.

●Ukuphathwa kwe-Thermal: Ukwakheka kwezinto kusiza ekugcineni iphrofayili yokushisa ezinzile ngaphakathi kwegumbi. Lokhu kuvumelana kwe-thermal kuyimfuneko yezinqubo zokunemba okuphezulu, lapho ngisho nokuguquguquka okuncane kwezinga lokushisa kungaba nomthelela omubi kwikhwalithi yefilimu nokusebenza kwedivayisi.

Kwa-Semixlab, sizibophezele ekuletheni izingxenye zekhwalithi ephezulu kanye nezinsizakalo Ezingokwezifiso embonini ye-semiconductor. Ithimba lethu lonjiniyela lingasebenza nawe ngokuqondile ukuze likhiqize amapuleti ekhava e-graphite ane-TaC ahambisana ngokunembile nobukhulu bemishini yakho, ukucaciswa kwesixhumi esibonakalayo, kanye nezidingo zenqubo ehlukile.

Ngaleso sikhathi, ithimba lethu lochwepheshe bezobuchwepheshe linolwazi olunzulu ngezinqubo ze-semiconductor. Sikulungele ukukusiza ngokukhetha umkhiqizo, ukwenza inqubo ibe ngcono, kanye nokuxazulula izinkinga, siqinisekisa ukuthi uzuza imiphumela engcono kakhulu evela ezingxenyeni zethu. Sibheke ngabomvu ukuba uzakwethu wesikhathi eside e-China.