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I-TaC embozwe indandatho yegraphite
Izindandatho ze-TaC Coated Graphite ezivela ku-Semixlab zenzelwe ukusebenza ngokwedlulele ekukhiqizeni ama-semiconductor. Izindandatho zethu zokumboza ze-Tantalum Carbide (TaC) CVD ezihlanzeke kakhulu zibalulekile ezinqubweni zokuhlanganisa i-CVD, PVD, kanye ne-plasma, esebenza njengezindandatho eziqondisayo, izindandatho zokugxila, namaringi e-liner. Yehlisa ukungcoliswa kwezinhlayiyana futhi uthuthukise isivuno se-wafer ngezinto zethu ezihlala isikhathi eside nezithembekile.
Incazelo
I-Semixlab TaC Coated Graphite Ring iyingxenye ebalulekile esetshenziswa ngokuyinhloko ngaphakathi kwemishini yokukhiqiza i-semiconductor. Iqukethe i-high-purity graphite substrate embozwe ngobunono ngesendlalelo se-Tantalum Carbide (TaC). Lokhu kunamathela okuthuthukisiwe kunikeza indawo ephakeme evikela i-graphite engaphansi ezindaweni zamakhemikhali ezinonya kanye nezimo zokushisa eziphezulu.
Izindandatho zethu ze-TaC Coated Graphite ziwusizo olukhulu ezinqubweni ezifana neChemical Vapor Deposition (CVD), Physical Vapor Deposition (PVD), kanye ne-plasma etching. Zisebenza njengesithiyo esivikelayo, indandatho yomhlahlandlela, noma ingxenye eyinhloko yesakhiwo ekamelweni lokusabela, eqinisekisa ubuqotho kanye nekhwalithi ye-wafer yokugcina ye-semiconductor.
Imininingwane
| Izakhiwo ezibonakalayo ze-Tantalum Carbide (TaC) Coating | |
| Ubuningi | 14.3 (g/cm³) |
| Ukukhipha umoya okukhethekile | 0.3 |
| I-coefficient yokwandisa ukushisa | 6.3*10-6/K |
| Ukuqina (HK) | 2000 HP |
| Resistance | 1 × 10-5 Om*cm |
| Ukuzinza Thermal | <2500 ℃ |
| Usayizi we-graphite uyashintsha | -10 ~ 20um |
| Ukuqina kwe-coating | ≥20um inani elijwayelekile (35um±10um) |
Izicelo
Izicelo kuzinqubo zeSemiconductor
Izakhiwo eziqinile ze-TaC Coated Graphite Rings yethu yokukhiqiza iSemiconductor izenza zibaluleke kakhulu ezinhlelweni ezimbalwa zokusebenza ezibalulekile.
1. I-Chemical Vapor Deposition (CVD)
Ezinqubweni ze-CVD, lapho amagesi asabela emazingeni okushisa aphezulu ukuze afake amafilimu amancanyana kuma-wafers, igumbi lokusabela liyindawo enolaka kakhulu. Izindandatho zethu ezimbozwe yi-CVD TaC zisetshenziswa njengezindandatho zokudonsa amanzi, izindandatho zomhlahlandlela, nezindandatho zomugqa. Zinikeza isivikelo esikhethekile kumagesi ezonakalisayo nokuhlaselwa kwamakhemikhali, ukuvimbela ukungcoliswa kwezinhlayiyana nokuqinisekisa ukujiya kwefilimu efanayo kuwo wonke amawafa. Ukuzinza okuphezulu kokushisa kwe-TaC kuvumela ukusebenza okuzinzile ngisho namazinga okushisa aphezulu kakhulu.
2. I-Physical Vapor Deposition (PVD)
Ngokufafaza kwe-PVD kanye nokuhwamuka kwe-e-beam, izindandatho zethu zisebenza njengezingxenye ezibalulekile ngaphakathi kwegumbi le-vacuum. Asebenza njengezindandatho ezivikelayo noma izindandatho eziqondisayo ezivikela ezinye izingxenye ezizwelayo emfucumfucwini ephumayo kanye nokuqhuma kwe-plasma. Ukuqina okungavamile kanye nokuminyana kwe-TaC enamathelayo kuyenza imelane kakhulu nokuguguleka kwezinhlayiyana, kunciphisa kakhulu ingcuphe yokuwohloka kwengxenye kanye nokukhubazeka okuyisilucwecwana okulandelayo.
3. I-Plasma Etching
Ngesikhathi sokuqoshwa kwe-plasma, i-plasma esebenza kakhulu isetshenziselwa ukususa izinto ku-wafer ngokukhetha. Lolu hlelo ludingida izingxenye
Competitive Advantage
Izinzuzo ze-Semixlab TaC Coated Graphite Rings
1. Ukuqina Okuphakeme
●I-CVD Eminyene ye-TaC enamathelayo imelana ne-plasma, ukuhlaselwa kwamakhemikhali, nokugqokwa komshini kangcono kakhulu kune-graphite engenalutho.
2. Ukuhlanzeka Okuphezulu Kwesivuno Semiconductor
●Yenziwe nge-ultra-low ukungcola graphite kanye ne-high-purity TaC coating ukuze kuncishiswe ukungcola kwe-ionic.
3. Precision Machining & Coating Control
●Ukusebenza kwemishini okuthuthukisiwe kokubekezelelana okuqinile; ukujiya okufanayo okunamathelayo kokusebenza okungaguquki.
4. Ukwenza ngokwezifiso Nokwesekwa Kobunjiniyela
● Izinketho zamadayamitha ahlukene, amaphrofayili ahlukene, ukujiya kokumboza, nezici zokuvala.
● Ukubonisana ngobuchwepheshe kwemiklamo eqondene nenqubo.
5. I-Prototyping Esheshayo & Ukunikezwa Komhlaba Wonke
●Ukukhiqizwa kwesampula okusheshayo, ukuhanjiswa komhlaba wonke, nezikhathi zokuhola ezinokwethenjelwa.
Imisebenzi Yethu
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