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Ukugeza kwe-quartz ye-semiconductor
Imininingwane Quick:
1.Amanye amagama: Ithangi le-quartz ye-semiconductor,ibhavu le-quartz le-semiconductor, ithangi le-quartz le-semiconductor.
2.Isicelo: I-Semiconductor Quartz Bath iyindawo ehlanzeke kakhulu, ekwazi ukumelana nokugqwala eklanyelwe ukuhlanzwa okunembayo nokucutshungulwa kwamakhemikhali ekukhiqizeni i-semiconductor. Idizayinelwe ukuhambisana nesistimu ye-WS-620C/ WS-820C/ WS-820L, le bhavu yequartz isebenza ngaphansi kwezimo ezishisa kakhulu (kufika ku-175°C) futhi ilungiselelwe ukusetshenziswa nezixazululo ze-phosphoric acid (H₃PO₄), iqinisekisa ukusebenza okukhethekile-cleaning ezinqubweni ezibucayi.
3. Amapharamitha angumongo:
I-quartz ehlanganisiwe (>99.99% SiO₂).
Ukungena kwamakhemikhali okukhethekile ku-H₃PO₄ (i-phosphoric acid) emazingeni okushisa aphakeme, ukuvimbela ukuwohloka noma ukukhiqizwa kwezinhlayiyana.
Imelana nokusebenza okuqhubekayo ku-160°C namazinga okushisa aphezulu angu-175°C, igcina ubuqotho besakhiwo nokuzinza kobukhulu.
Incazelo
I-Semiconductor Quartz Bath iyingxenye yokuhlanzeka okuphezulu, ukumelana nokugqwala eklanyelwe ukuhlanzwa okunembayo nokucutshungulwa kwamakhemikhali ekukhiqizeni ama-semiconductor. Idizayinelwe ukuhambisana nesistimu ye-WS-620C/ WS-820C/ WS-820L, le bhavu yequartz isebenza ngaphansi kwezimo ezishisa kakhulu (kufika ku-175°C) futhi ilungiselelwe ukusetshenziswa nezixazululo ze-phosphoric acid (H₃PO₄), iqinisekisa ukusebenza okukhethekile-cleaning ezinqubweni ezibucayi.
Izici Key
Ukuphakama Okubalulekile
I-High-Purity Quartz: Ikhiqizwe kusuka ku-synthetic fused quartz (>99.99% SiO₂), iqinisekisa ukungcoliswa okuncane kanye nokumelana nokushaqeka okushisayo.
Ukumelana ne-Acid
Ukungena kwamakhemikhali okukhethekile ku-H₃PO₄ (i-phosphoric acid) emazingeni okushisa aphakeme, ukuvimbela ukuwohloka noma ukukhiqizwa kwezinhlayiyana.
Ukuzinza Okushisayo
Imelana nokusebenza okuqhubekayo ku-160°C namazinga okushisa aphezulu angu-180°C, igcina ubuqotho besakhiwo nokuzinza kobukhulu.
Izinzuzo Zokusebenza
Ukulawula Ukungcola: Ukuqedwa kwendawo okubushelelezi kakhulu kunciphisa ukunamathela kwezinhlayiyana, okubalulekile ezinqubweni ze-sub-micron semiconductor node.
Ukuphila isikhathi eside: Ukumelana kwe-quartz nokugqwala kwe-asidi nokukhathala okushisayo kwandisa impilo yesevisi, kunciphisa isikhathi sokuphumula kanye nezindleko zokuyilungisa.
Ukungaguquguquki Kwenqubo: Ukusebenza okuzinzile kwe-thermal kuqinisekisa ukusatshalaliswa kwezinga lokushisa okufanayo, kuthuthukisa ukusebenza kahle kokuhlanza nokuphindaphinda.
Kungani Khetha Ibhavu Le-quartz le-Semixlab Semiconductor?
Ikhwalithi ye-Semiconductor-Grade: Ikhiqizwe endaweni ehlanzekile ukuze ihlangabezane namazinga we-SEMI.
Izixazululo Ezihlanganisiwe: Imiklamo yangokwezifiso etholakalayo ukuze ihambisane nezidingo zenqubo ethile.
Ukuthembeka: Ukuhlolwa kwekhwalithi okuqinile kuqinisekisa ukuhambisana nezidingo zemboni ye-semiconductor.
Imininingwane
| Impahla yemishini | Ukuminyana (g/cm3) | 2.2 |
| Ubunzima bukaMohs | 6-7 | |
| Amandla acindezelayo (MPa) | 1100 | |
| Amandla okuqina (N/mm2) | 50 | |
| Amandla e-Flexural (N/mm2) | 65 | |
| Amandla e-torsional (N/mm2) | 30 | |
| I-Young's modulus (MPa) | 7.2x104 | |
| Isilinganiso sikaPoisson | 0.16 | |
| Izakhiwo ezishisayo | I-coefficient of thermal expansion (20~320℃,k-1) | 5.5x10-7 |
| I-Thermal conductivity (20℃,W·m-1k-1) | 1.4 | |
| Ukushisa okuqondile (20℃, J·kg-1k-1) | 670 | |
| Iphoyinti lokuthambisa (℃) | 1700 | |
| Iphoyinti lokunamathisela (℃) | 1180 | |
| Iphoyinti le-Strain (℃) | 1080 | |
| Impahla kagesi | Ukumelana nogesi (Ω·m) | 1x1016(20 ℃) |
| I-Dielectric constant (10GHz) | 3.74 | |
| Ukulahleka kwe-Dielectric (10GHz) | 0.0002 | |
| Amandla e-Dielectric (V·m-1) | 3.7x107 |
Izicelo
I-Wafer Cleaning: Ukususwa kwe-photoresist, izinsalela, nokungcola ku-H₃PO₄-based solutions post-etching noma lithography.
Izinqubo Zezinga Lokushisa Eziphezulu: Ifanele izinyathelo zokwenza i-semiconductor ethuthukisiwe edinga amakhemikhali anolaka emazingeni okushisa aphakeme.
Ukuhambisana: Kulungele isistimu ye-WS-620C/ WS-820C/ WS-820L ezindwangu ezikhiqiza ingqondo, inkumbulo, noma amadivayisi wamandla.
