I-CVD Silicon Carbide (SiC) Coating

I-CVD SiC coating ngokuyisisekelo iwungqimba lwe-silicon carbide olubekwe ku-graphite, futhi lusetshenziswa kabanzi kumathuluzi e-epitaxy lapho kokubili izinga lokushisa nokuhlanzeka kubalulekile. Emigqeni yokukhiqiza yangempela, uzovame ukuyibona ezinhlelweni ezivela ku-AIXTRON, ASM/LPE, Veeco, kanye nakwamanye amapulatifomu ahlobene ne-AMAT. Okwenza kube usizo akukhona nje ukumelana nokushisa, kodwa nokuzinza okuphelele ngesikhathi sokuhamba isikhathi eside. Ngaphansi kwezimo ezijwayelekile ze-epitaxy - i-hydrogen, i-ammonia, noma ngisho namagesi ane-chlorine - i-coating ihlala izinzile futhi ivikela i-graphite engaphansi. Lokho kusiza ukugcina insimu yokushisa ihambisana kakhulu futhi kunciphisa amathuba okubonakala kwezinhlayiya ngesikhathi sokukhula.

Esikhathini esiningi, ungqimba lufakwa ezingxenyeni ezifana nama-susceptors, izithwali ze-wafer, amasongo e-graphite, noma izingxenye ze-half-moon. Konke lokhu kuhileleke ngqo ekufudumaleni noma ekubekeni i-wafer, ngakho-ke noma yikuphi ukungazinzi okuncane kungathinta isivuno. Ngaleso sizathu, izingxenye ezimboziwe zivame ukuphathwa njengezinto ezisetshenziswayo ezisadinga ukuthembeka emijikelezweni eminingi, ikakhulukazi ekukhiqizweni kwamasentimitha angu-4 kuya kwangu-12.