I-Quartz Heat Shield

I-Quartz Heat Shield, eyenziwe nge-milky quartz emhlophe, iyingxenye yokulawula okushisayo ethuthukisiwe eklanyelwe ukusetshenziswa ezinhlelweni zokushisa eziphezulu ze-SiC epitaxy. Uma kuqhathaniswa ne-quartz esobala, le nto ihlinzeka ngokufakwa okuphezulu, ukuzinza kwenqubo okuthuthukisiwe, kanye nokusebenza kahle kwezindleko-okuyenza ifaneleke ukuvikela okushisayo emakamelweni okusabela e-MOCVD kanye ne-CVD.

Ⅰ. Ukubunjwa Kwezinto Ezibalulekile Nezakhiwo Zomzimba Ezibalulekile

● Okubalulekile: I-quartz emhlophe e-Milky (isilica ehlanganisiwe yokwenziwa enamabhamuza amancane ahlakazekile nemingcele yezinhlamvu)

● Umbala & Ukubukeka: Okumhlophe ngokucwazimulayo

● I-Thermal Conductivity: Iphansi kunequartz ebonisa ngale ngenxa yesakhiwo sebhamuza sangaphakathi

● Izinga Lokushisa Lokusebenza: Lizinzile kufika ku-1700°C

● I-Thermal Expansion Coefficient: ~0.55 × 10⁻⁶ /K (kufana nequartz ebonisa ngale)

● I-High Thermal Shock Resistance

● Ukuhlanzeka Kwamakhemikhali Okuhle Kakhulu: Landela ukungcola (isb, Al, Na) okugcinwa ngaphansi kuka-1 ppm

Ⅱ. Imisebenzi Ebalulekile ku-SiC Epitaxy Applications

I-Milky quartz emhlophe ikhethelwe ngokukhethekile ama-SiC epitaxial reactors ngenxa yalezi zinzuzo ezibalulekile ezilandelayo:

(1) Ukusebenza Okuthuthukisiwe Kwe-Thermal Insulation

I-Infrared Radiation Scattering: Amabhamuza angaphakathi nemingcele yokusanhlamvu isakaza imisebe ye-IR izikhathi eziningi, kunciphisa kakhulu ukudluliswa kokushisa okukhazimulayo. Inikeza u-30–50% wokwahlukanisa okungcono kunequartz ekhanyelayo ngaphansi kwezimo ezingu-1500–1700°C.

Ukusebenza Okuphansi Kwe-Thermal: Ukusatshalaliswa kwe-Microbubble kunciphisa ukulahleka kokushisa okuqhutshwayo, kuthuthukisa ukusebenza kahle kokushisa okuphelele.

(2) Ukuqina Nokuqina Kwezinga Lokushisa Okuphezulu

I-Thermal Shock Resistance: Ngenkathi yabelana nge-coefficient efanayo yokunweba njenge-quartz ecacile, i-microstructure yayo isiza ukumunca ukucindezeleka okushisayo okwenziwe kwasendaweni—ilungele izinqubo zokukhuphuka okusheshayo/zokuhlela phansi.

I-Crystallization Resistance: Ezimoyeni ezinciphisa izinga lokushisa eliphezulu (isb, H₂), i-milky quartz imelana kakhulu ne-devitrification ibe i-α-cristobalite, inciphisa ingozi yokuphuka.

(3) Ukuhambisana Kwenqubo Nokulawulwa Kwe-Deposition

Ukuncipha KweParasitic Deposition: Ukufiphala kwayo kunciphisa ukushisa kwasendaweni, okuvimbela ukubola ngaphambi kwesikhathi kwezandulela (isb, SiH₄, C₃H₈) endaweni yesihlangu.

I-Uniform Temperature Field: Ukuziphatha okuhlakazekayo kukhuthaza nokusatshalaliswa kwezinga lokushisa kuyo yonke indawo yokusabela, okubalulekile ekuzuzeni ukufana kwe-epitaxial layer kumadivayisi wamandla we-SiC.

(4) Ukusebenza Kwezindleko

Izindleko Zezinto Eziphansi: I-Milky quartz emhlophe ngokuvamile ithengeka kakhulu kune-ultra-high-purity transparent quartz, okuyenza ifaneleke njengengxenye yesithiyo esishisayo esisebenzisekayo.

(5) Isondlo Nokucatshangelwa

Isiqiniseko Sobumsulwa: Qinisekisa amazinga okungcola aphansi kakhulu (Al, Na <1 ppm) ukuze ugweme ukungcoliswa kwendawo ye-SiC epitaxial.

Ukulawulwa Komjikelezo Wokuphila: Ngemva kokusetshenziswa isikhathi eside (imvamisa > amahora angu-1000), ukuhlangana kwe-microbubble kungase kwehlise ukusebenza okushisayo—ukushintshwa okuvamile kuyanconywa.

Izicelo ezijwayelekile

✔SiC MOCVD kanye ne-CVD reactors

✔Ukukhula kwe-Epitaxial kwama-semiconductors amandla e-SiC

✔Amakamelo okushisa aphezulu kanye namakamelo okubeka

✔Isivikelo esishisayo endaweni ye-vacuum/inert gas