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I-membrane ye-ceramic ye-SiC
I-SiC Ceramic Membrane eyakhiwe yi-Semixlab Semiconductor iyingxenye ye-porous silicon carbide eyenziwe ngokunemba eklanyelwe izindawo ezihlanzekile kakhulu nezinokushisa okuphezulu kuzinqubo ze-CVD, MOCVD, kanye ne-PECVD. Ngokuzinza kwamakhemikhali okukhethekile, amandla emishini, kanye ne-thermal conductivity, inikeza ukulawula okuthembekile kokugeleza kwegesi, ukuhlunga kwezinhlayiyana, nokuvimbela ukungcoliswa ngaphakathi kwama-reactors okukhiqiza ama-semiconductor.
Incazelo
Ekwenziweni okuthuthukisiwe kwe-semiconductor, i-SiC Ceramic Membrane isebenza njengengxenye yemisebenzi eminingi ethinta ngokuqondile ukuqina kwenqubo, ukufana kwe-wafer, kanye nokusebenza kwesivuno kukonke. Ngaphakathi kwezinhlelo ze-CVD, MOCVD, kanye ne-PECVD, isebenza njengesixhumi esibonakalayo esibalulekile phakathi kwamagesi enqubo kanye nemvelo yokusabela, iqinisekisa ukulawulwa okunembile kokuguquguquka kokugeleza, ibhalansi eshisayo, nokucindezelwa kokungcola.
Ngokwakhiwa kwayo okunezimbotshana ezifanayo kakhulu, i-membrane ye-SiC ithuthukisa ukulethwa kwegesi okusatshalaliswa ngokulinganayo endaweni eyi-wafer. Le nkambu yokugeleza okufanayo inciphisa ukuhluka kwendawo ekugxilweni kwesandulela, ngaleyo ndlela ithuthukise ukufana kokuqina kwefilimu kanye nokuvumelana kokuqamba ngesikhathi sokubekwa kwe-epitaxial noma i-dielectric. Ngesikhathi esifanayo, ukwakheka kwezimbotshana ezinhle zolwelwesi kusebenza njengesihlungi sezinhlayiyana ezinezinga eliphezulu lokushisa elisebenzayo, sithwebula ama-condensate, izinsalela zekhabhoni, nezinsalela ze-submicron ngaphambi kokuba zifike endaweni eyi-wafer esebenzayo—isici esibalulekile ekwehliseni ukuminyana kokukhubazeka nokugcina ukuthembeka okuphezulu kwedivayisi.
Ngaphandle kokugeleza nokuhlunga, i-matrix ye-ceramic ye-SiC inikeza umgoqo oqinile oshisayo namakhemikhali ngaphakathi kwegumbi lenqubo. Ihlukanisa izingxenye ezizwelayo ezinhlotsheni ezisebenzayo, inciphise ukungcoliswa emuva, futhi ilondoloze ukuhlanzeka kwegumbi phakathi nemijikelezo yokukhiqiza enwetshiwe. Ezifundeni zokukhipha umoya, kungasetshenziswa ubuchwepheshe obufanayo bolwelwesi ukuze kunzinziswe ingcindezi futhi kuvalwe imikhiqizo esele esele, kube nomthelela emigqeni yokukhipha umoya ehlanzekile kanye nezikhawu zokulungisa ezinde.
Ngokuhlanganisa le misebenzi engxenyeni eyodwa ehlala isikhathi eside, i-SiC Ceramic Membrane ayithuthukisi nje kuphela ukusebenza kahle kwe-CVD ne-MOCVD reactors kodwa futhi inika amandla indawo yenqubo ezinzile futhi ephindaphindwayo—ehlangabezana nokuhlanzeka okuqinile kanye nezidingo zokusebenza zokwenziwa kwe-semiconductor yesizukulwane esilandelayo.
Yenziwa kanjani i-SiC Ceramic membrane
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