Ukugcinwa kwe-Veeco Epitaxy Kwesikhathi Eside Sokuphila Kwezingxenye Ezimbozwe yi-SiC

Kumshini wokwenza ama-chip weVeeco, I-cvd sic coating Izingxenye zihlala zibhekene nokushisa, i-plasma kanye nokugeleza kwegesi njalo lapho zigijima. Kancane kancane lokhu kucindezeleka kushintsha ubuso bezingxenye ngokuhamba kwesikhathi noma ngabe zisesezinhle ngokubonakalayo. Izitshalo eziningi zithole ukuthi izinguquko ezincane ekubukekeni kwengubo, zibangela ukungcola okunothuli, ukushintshashintsha kwezinga lokushisa kanye nokwanda kokuhlanza umshini. Umshini wokukhiqiza uthole ukuthi ngokushintsha nje isikhathi sokuwasha izingxenye wawuvimbele ukuguguleka kwangaphambi kwesikhathi kwezinkampani ezithwala impahla, futhi kwaholela ekusebenzeni okuzinzile isikhathi eside. Ngokusebenzisa imikhuba efanele yokunakekela, I-CVD TaC futhi Cvd si Izingxenye ezimboziwe ziyingxenye ethembekile nehlala isikhathi eside eqinisekisa ukuzinza komshini kanye nokungaguquguquki kwemiphumela.

Amathiphu Okulungisa Okuvimbelayo Emishini Ye-Veeco EPIK Epitaxy

Isikhathi esihle sokuphila isikhathi eside semishini yeVeeco sincike kakhulu ezintweni ezincane ozenzayo njalo esikhundleni sokulungiswa okukhulu. Ukwehluleka okuningi kokugqoka kwenzeka kancane kancane futhi ukukwazi ukubona izimpawu zokuxwayisa kunomthelela omkhulu. Ukuhlanza nokuhlola izingxenye kanye nama-liners njalo ngemva kokugijima inani elithile kuwumkhuba ozuzisa kakhulu kunokulinda kuze kube yilapho izingxenye zehluleka.

Noma yimuphi umehluko omncane ekuzizweni kwendawo noma ekushintsheni kombala ubonisa ukuthi kukhona ungqimba olungase lusebenze kakhulu. Esinye isikhungo sabhekana nezinkinga zokushisa ngenxa yokungenzi ukuhlolwa kwezingxenye kanye ne-liner okuvamile sabe sesikwazi ukulungisa lezi zinkinga zokushisa ngokumane sihlanze futhi silinganise futhi.

Indlela izingxenye ezihlanzwa ngayo nayo ibalulekile. Amakhemikhali anamandla noma izinto zokuhlanza kanye nokuhlanza okuqinile kakhulu kuzobangela ukwehluleka kokugqoka ngokushesha okukhulu. Imikhuba yokuhlanza emnene neqondile isebenza kahle kakhulu ikakhulukazi ezingxenyeni ezisebenza emazingeni okushisa aphezulu. Abanye abasebenzi bavame ukusebenzisa izinto zokuhlanza ezithambile uma umshini usebenza kahle futhi bahlehlise inqubo yokuhlanza ejulile kuze kube yilapho kudingeka ngempela.

Ukugeleza kwegesi kungaba omunye umkhuba wokulungisa okhohliwe futhi nakuba kungase kubonakale kungabalulekile, ukugeleza kwegesi okungalingani kuzoholela ezindaweni ezishisayo eziguga uqweqwe oluvela ezingxenyeni. Ukuhlolwa okusheshayo kwenzwa ngaphambi nangemva kokugijima kuzovimbela ukwehluleka okunjalo. Izigaba zokupholisa akufanele zisheshiswe nhlobo. Ingxenye engapholiswanga kahle izokwakha ukucindezeleka phakathi kwezinto zengxenye kanye noqweqwe. Ukwandisa nje isigaba sokupholisa ngemizuzu embalwa eyengeziwe ngesikhathi sokugijimisa okumatasa kakhulu kwatholakala kuvimbela ukuqhekeka okuncane kakhulu ezingxenyeni endaweni eyodwa.

Ukugcinwa kwamarekhodi okubonwe, imiphumela, kanye nokuziphatha nakho kuwusizo kakhulu ekulindeni ukwehluleka kwengxenye ngenxa yokonakala kwengubo. Ngokuzibophezela ekunakekelweni okuvamile, umshini awuthambekeli kakhulu ekuhlulekeni okukhulu futhi izingxenye zihlala isikhathi eside.

Indlela Izingxenye Eziyisipele zeVeeco Ezithinta Ngayo Ukuzinza Kwesivuno Nokulingana Kwenqubo

Njengoba imishini yakho iguga, izipele ziyashintsha kancane kancane ukuzinza. Izinto ezifana namasongo okuthwala, ama-liners kanye namapuleti egesi zingase zibonakale zilula kakhulu kodwa isimo sazo sibhekene ngqo nokushintsha ibhalansi yokushisa kanye nokugeleza kwegesi. Izinguquko ezincane esimweni sengxenye eyodwa eyisipele zizoshintsha indlela ukushisa okusabalala ngayo.

Sibone isibonelo esisodwa sokwehla kancane kancane kwesivuno esivela emaphethelweni angaphandle ama-wafers okwakubangelwa ukuguguleka kweresiphi kodwa kamuva kwatholakala ukuthi kungukungalingani kokushisa okubangelwa yizindandatho zokuthwala ezigugile ezimbozwe ngenxa yezingxenye ezisele ezikhiqizwe kabi. Lapho izingxenye zekhwalithi ephezulu seziphinde zethulwa, ibhalansi yokushisa yabuyiselwa futhi yonke imikhiqizo yabuya.

Impikiswano efanayo iyasebenza ezingxenyeni zokugeleza kwegesi. Ingxenye elula njenge-gas showerhead ingagoba kancane noma ivaleke ngendlela yokuthi iphazamise ukugeleza kwegesi okufanayo kulo lonke igumbi futhi ngaleyo ndlela ithinte ukujiya kwe-wafer coating. Kwenye indawo baphawula ukuthi ukujiya kwe-wafer kwakuqhubeka kushintsha kusuka kwesobunxele kuya kwesokudla, imbangela etholakele kwakuyipuleti legesi eligugile elalisebenze amahora amaningi kakhulu.

Ukusebenzisa izingxenye ezifanayo kuyo yonke indawo kuzosiza ukuvimbela lolu hlobo lokushintshashintsha. Ukusebenzisa izingxenye ezifanela imishini yokuqala ngokwezidingo zokuqala kusho ukuthi imishini izohlala isebenza ngendlela efanayo nangemva kokulungiswa ngakunye. Ukugcinwa nokuphathwa kwezingxenye ezisele nakho kuba yinto ebalulekile. Ingxenye embozwe ngendwangu ebilokhu ihleli endaweni evulekile yelabhorethri isikhathi eside izodonsela uthuli.

Izinhlayiya ezincane kulesi sifunda zingakhula ngokushesha zibe amaphutha enkambisweni yokushisa okuphezulu. Amafektri amaningi manje agcina zonke izinto zawo ezisele ezitsheni ezivaliwe, ezivulwa kuphela kuze kube yisikhathi sokufakwa kwengxenye ethuluzini.

Ukuhlela izinhlelo zokusebenza ezisele nakho kubalulekile - zisebenza sekwephuzile futhi kubangela ukushintshashintsha kwemiphumela okungabonakali, kodwa ukufaka kusenesikhathi kakhulu bese imali ilahleka. Ibhalansi engcono kakhulu ingatholakala ngokusekelwe emahoreni, ekuhlolweni okusheshayo.

Izindlela Zokuhlanza Ezinciphisa Ukuguguleka Kwezingxenye Ezimbozwe Nge-CVD SiC

Ukulinganisela lezi zingxenye ezimboziwe ukuze zihlanzwe kuncike kulokhu. Kufanele ususe ukwakheka okuqhubekayo ngenkathi ugcina ungqimba lwakho lubushelelezi futhi lungalimele. Uma ukuhlanza kulukhuni kakhulu, ubuso bengxenye buyaguga ngokushesha, uma buthambile kakhulu kuvamile ukuthi izinsalela ziqongelele ngezinga elicasulayo futhi zibhubhise ukuhamba kwakho.

Izendlalelo zamakhemikhali asele zizomboza kancane kancane ingxenye yakho ngokuhamba kwesikhathi njengefilimu encane yezinsalela ngesikhathi sokushisa. Nakuba lokhu kuyinto yemvelo, inkinga iyenzeka uma uqala ukususa ungqimba engxenyeni.

Isigaba sokuqala enkambisweni yokuhlanza ephephile ukuhlanza okomile. Ukuhlanza ukushisa negesi kuvumela ukususwa okungathathi hlangothi kokuqongelela okuthambile kwezinsalela okungaba yisisombululo esihle sokuqongelela okuthambile okungaba khona ngemva kokuhamba okufushane nokwakheka kokukhanya.

Kunoma yiziphi izimo zokuhlanza uketshezi, ukucwilisa ngamakhemikhali okuthambile kungcono kunezibhavu ezine-asidi. Amaqembu amaningana asebenzisa amakhemikhali ancishisiwe anezikhathi ezincane zokucwilisa. Esinye isikhungo sibike ukuthi ukufinyeza izikhathi zokucwilisa kancane kancane kwandisa impilo yengxenye izinyanga ngoba ungqimba alulahlekelwa ukukhanya kwalo.

Indlela engokoqobo ingenye ingxenye ebalulekile yokulondolozwa kwengubo. Ama-scouting pad, amabhulashi aqinile, noma izifutho zamanzi ezinomfutho ophezulu zingaletha imihuzuko emincane enguboni ephenduka imithombo yothuli ngesikhathi sengubo. Imihuzuko efanele yokuhlanza nokomisa nayo ibaluleke kakhulu; izinsalela zezinto zokuhlanza ezisele zizodla ingubo yakho ekushiseni okuphezulu.

Ukuhlanza ngamanzi ahlanzekile okulandelwa inqubo yokomisa ngokulinganayo kufanele kukwenze. Enye indlela ezinye izitshalo ezisebenza ngayo ukuhlukanisa izinqubo zazo zokuhlanza ngokusekelwe ezingeni lokuguguleka; ukwakheka okulula kuzosebenzisa ukuhlanza okuthambile kanti ukwakheka okukhulu kuzosebenzisa ukuhlanza okunamandla ukuze kugwenywe ukuhlanza izingxenye ezifanele ngokungadingekile.

Ukwandisa Isikhathi Sokuphila Se-Susceptor Ngokusebenzisa Ukuphathwa Kokushisa Okuthuthukisiwe

Izithwali zalezi zinhlelo zenza umsebenzi onzima kakhulu. Lawa madivayisi atholakala endaweni eshisa kakhulu, afaka ama-wafer futhi alwela ukugcina izinga lokushisa lifana ngokuphelele. Eziningi zalezi zingxenye ziguga kakhulu ngenxa yokucindezeleka kokushisa, hhayi ngenxa yokuphathwa noma ukuhlanza. Izimo zokushisa ezizinzile ziyisici esiyinhloko sokuthuthukisa impilo.

Izinguquko ezisheshayo noma ezingaguquguquki zokushisa zibangela ukwanda okungalingani kwezinto ezingaphansi komhlaba kanye nokwembozwa. Lokhu kubangela ukucindezeleka okukhulu kwangaphakathi. Esinye isikhungo sokukhiqiza sabona ukuqhekeka komphetho ngaphambi kwesikhathi, ngoba izinga lokushisa lasekuseni lalishesha kakhulu ngenxa yomthwalo womsebenzi, futhi samane salawula isikhathi sazo sokushisa.

Ukwehlisa izinga lokushisa/ukupholisa izikhathi kususe kancane ukucindezeleka kokushisa engxenyeni. Lokhu kushintsha okuncane kube nomthelela omncane ekuphumeni kwazo, kuyilapho kwandisa kakhulu impilo yendawo. Ngisho nokusabalala kokushisa nakho kudlala indima. Uma izingxenye ezithile zenkampani ethwala ukushisa zihlala zishisa, lezi zingxenye zizowohloka ngokushesha futhi zonakalise imiphumela ye-wafer ngaphambi kokuba kutholakale ukuguguleka kwendawo okubonakalayo.

Ukuskena okuvamile kwephrofayili yokushisa kungabona kalula izinkinga zokushisa okungalingani. Lokhu cishe njalo kuwumphumela wokungahambisani kahle okuncane, ukugeleza kwegesi okungafani noma ama-heater awohlokile. Ukulawula isikhathi sokupholisa kubaluleke ngendlela efanayo. Ukususa izingxenye ngemva komjikelezo oshisayo ngokushesha kakhulu kuzoholela ekudonsweni kwengubo kusuka ezintweni ezingaphansi. Ukunciphisa isikhathi sokupholisa kuqeda ukucindezeleka okukhulu kwangaphakathi. Amanye amaqembu okukhiqiza akwazi ukwelula izikhathi zokupholisa kuphela ngezikhathi zomsebenzi ophezulu.

Izindleko zesikhathi esengeziwe sokupholisa izingxenye eziningi zincane, kodwa zengeza kakhulu empilweni yazo. Elinye isu eliwusizo lokwelula impilo yesithwali, nezinye izingxenye, ukugwema izinguquko zokushisa ezigcwele amandla noma nini lapho kungenzeka. Ukusebenza emazingeni okushisa aphakathi ngesikhathi sokungasebenzi esikhundleni sokubuyisela uhlelo ekushiseni ngokushesha ukuze luyeke kancane kuzonciphisa kakhulu ukushaqeka kokushisa.

Ukuhlonza Umonakalo Ongaphezulu Ngaphambi Kokungcoliswa Kwezinhlayiya

Ngakho-ke, umonakalo womphezulu uvame ukuqala buthule, ngaphambi kokuba udale inkinga embi yothuli ngaphakathi komshini. Ubunzima buwukuthi ekuqaleni, ukuguguleka kuzobonakala kungenangozi kuwe, kodwa kusaphazamisa ukuzinza kwenqubo yakho buthule. Icebiso lokuqala kungaba ukulahlekelwa ukupholisha (noma ukukhanya komphezulu).

Ukwembozwa okuhle kuzobukeka kubushelelezi futhi kucwebezela ngaphansi kokukhanya, kodwa ukuguguleka kokuqala kokwembozwa kungase kubonakale kungabonakali kahle noma kunamachashazi acwebezelayo angajwayelekile ebusweni. Omunye wabasebenzi emgqeni wabona indandatho encane efana nobisi kwenye ingxenye ngemva kokuhlanza futhi akazange anake kwaze kwaba ngemva kwamasonto amabili, inani lothuli kuleyo ndawo landa kakhulu.

Ukwakheka okungalingani kungaba enye inkomba. Ukungcola okusele okuvame ukunqwabelana kakhulu endaweni ethile kungenye inkomba, kukutshela ukuthi le ndawo isiqalile ukuba mandundu. Kusho ukuthi ukwakheka akuwi kalula, ngokungafani nendawo enhle nebushelelezi.

Izinguquko zokushisa zingakutshela okuthile; ushintsho oluncane ekushiseni okufanayo kulo lonke i-wafer lungase lusho ukuthi indawo ayisadlali indima yayo kahle, isikhathi eside ngaphambi kokuba ubone umonakalo.

Asifuni ukuthinta izingxenye (njengoba ngokuqinisekile kuzoqala uthuli), kodwa ungahlola lezo zici ngokungaqondile. Isibonelo, uma kuba isikhathi eside kakhulu ukuthi ingxenye ethile ihlanzwe ngenqubo yakho ejwayelekile, ngokuvamile kusho ukuthi ubuso bushintshile futhi abulingani manje.

Ukuqapha inani lothuli ngaphakathi komshini kungenye yezindlela zokuzivikela ezithembeke kakhulu ongazithatha, ngisho nokwenyuka okuncane kancane akufanele kubekezelelwe. Iqembu elilodwa lithole ukwehluleka kwe-liner ekuqaleni ngenxa yokubona ukuthambekela okuhamba kancane kakhulu ekugijimeni okuningana kunokulinda i-alamu enkulu yomshini ophukile.

Ukugcinwa nokuphathwa kwezingxenye kuyisici esibalulekile njengoba ukuklwebheka okuncane ebusweni bento eqinile kungabangela umthombo omkhulu wothuli lapho kushisa. Yingakho ubona imishini eminingi inamathileyi athile athambile okugcina izingxenye.