Ukuhlola Amandla Okunamathela Kwe-CVD TaC Coating kanye Nezingozi Zokuxebuka

Ukuze uthole izembozo ezikhethekile ku-graphite, I-CVD TaC futhi I-cvd sic coating Njengoba izingxenye zemishini yokwenza ama-chip ashisa kakhulu, ukusebenza kokubopha kwengubo engxenyeni kubaluleke kakhulu empilweni yezingxenye. Ukubopha okubuthakathaka kubangela ukuqhekeka okuncane kanye nokuqhekeka ezinqubweni zokushisa nokupholisa, okudala ukungcola noma ukuvikelwa okungalingani kanye nokwehluleka kwenqubo. Izingxenye eziningi zibukeka kahle ekuqaleni efektri futhi umkhawulo wayo uyaqhekeka ngemva kokusebenzisa izikhathi eziningana. Ngakho-ke, amandla e-bond kufanele ahlolwe ngaphambi kokuba izingxenye ezisetshenziswa efektri zigweme ukwehluleka okungalindelekile emishinini.

Ukuhlolwa Okujwayelekile Kokunamathela Kwe-CVD TaC Coating Kuma-Graphite Substrates

Ukuze kutholakale amandla alinganiselwe, kwenziwa izivivinyo eziningana zekhwalithi emafektri; okokuqala ukuhlolwa kokuklwebheka. Lapha, kudwetshwa i-tip yedayimane phezu kwengubo ngaphansi kwamandla akhulayo, uma ifilimu iqhekeka, iqhekeka noma iphuma kungqimba lwe-graphite ngaphambi kwesikhathi ikhombisa ukunamathela okubi. Lokhu ukuhlolwa okulula kodwa kukhombisa imiphumela ecacile ngaphambi kokuba izingxenye zingene enkonzweni.

Okunye ukuhlolwa okusheshayo ukuhlolwa kwetheyiphu lapho i-adhesive tape ifakwa khona efilimini bese ikhishwa; uma ama-flakes ephuma netheyiphu, isibopho nesisekelo se-graphite singase sibe buthaka. Lokhu ukuhlolwa kokuqala okusheshayo okusetshenziswa emalabhorethri ngaphambi kokuhlolwa okunzima kakhulu.

Ukushisa nokupholisa okuphindaphindiwe nakho kuthandwa kakhulu, ngoba inqubo ilingisa ukusetshenziswa kwangempela ngokuphelele. Ukugqoka okuqinile akubonisi imiphumela emibi, kuyilapho ukugqoka okubuthakathaka kuqala ukuqhekeka noma ukuqhekeka emaphethelweni. Kwesinye isimo semboni, ukugqoka kwehlulekile ekuhlolweni kwesibili ngemuva kokushiswa ngokuphindaphindiwe (ukuqhekeka emaphethelweni) yize lokhu kwakungenxa yokungcola kwe-substrate ngaphambi kokusetshenziswa.

Ukuhlolwa kokudonsa (lapho i-stud inamatheliswa khona embozweni bese idonswa kuze kube yilapho i-substrate isuka kuyo) olunye uvivinyo, olunikeza inani ku-continuum, luhle ekuqhathaniseni ama-batches kodwa lungathatha isikhathi eside ukukwenza. Ukuhlolwa kokufakwa kwe-indentation kusetshenziswa njengokuhlolwa okubonakalayo nokulinganiselwe, lapho iphuzu eliqinile lifakwa embozweni futhi kulinganiswa ubukhulu bokwakheka kwe-crack. Uma kwenziwa kahle ndawonye, ​​​​lezi zivivinyo ziqinisekisa ubuqotho obuhle bembozo.

Izimpawu Zesexwayiso Zasekuqaleni Zokuqhekeka Kwe-TaC Coating Ezicelweni Ze-Epitaxy

Lezi zinhlobo zemishini zinezimo ezimbalwa kakhulu lapho ukuhlukaniswa kwengubo kwenzeka ngokungazelelwe. Esikhathini esiningi kwenzeka ushintsho oluncane engxenyeni, olungabonakali. Ukushintsha kombala kwengubo kuvela kusenesikhathi. Ingubo entsha kufanele ibonakale ilingana futhi ibushelelezi kodwa ngaphansi kokucindezeleka ingxenye ethile ibonakala inombala ofiphele, ikakhulukazi emaphethelweni, emakhoneni nasezindaweni ezinokushisa okuphezulu.

Ngokuvamile kukhona nokuphakamisa okuncane kakhulu komphetho okubonakala njengengqimba yokuma yokugqoka emingceleni uma kubhekwa ekukhanyeni nge-engeli efanele noma ekukhulisweni okuphezulu. Komunye umugqa wefektri isisebenzi sokuhlanza sabona izinhlayiya zothuli ezincane eduze komphetho wengxenye, futhi sathola ukuthi ukuqhekeka kwase kuqalile kakade emphethweni.

Ukuqhekeka kwezinwele nakho kubonisa inkinga. Ukuqhekeka kokuqala kuhle futhi kungaphandle futhi kuvela ezindaweni zokucindezeleka kokushisa, ekugcineni kuxhumanisa ukwakha izindawo ezinkulu zokuqhekeka uma ukuqhekeka kungalungiswa. Ezinye izinkomba ezicashile zifaka amazinga aphezulu ezinhlayiya noma uthuli ngaphakathi kwegumbi.

Ngisho noma kungekho sici esibonakalayo esibonakalayo ephepheni, izinhlayiya zingase zichithe iphepheni ngesikhathi sokusebenza futhi zingabonakala kumamonitha ngaphambi kokwehluleka okukhulu. Ukungagugi kunganda, njengoba iphepheni ebelikade libushelelezi liqala ukubonakala njengongwengwezi ngenxa yokuwohloka kwengqimba ephezulu yephepheni.

Ngenxa yokuthi iphutha elincane eliseceleni lingakhula libe ukwehluleka okukhulu okuphazamisa ikhwalithi futhi kudingeke isikhathi sokungasebenzi komshini, ukuhlonza lezi zinkomba zokuqala kubalulekile.

Imiphumela Yokujikeleza Okushisayo Ezingxenyeni Ze-Epitaxial Ezimbozwe Nge-CVD TaC

Ngenxa yokuthi izingxenye ezimboziwe zifudunyezwa futhi zipholiswe ngokuphindaphindiwe emini, kuba nokucindezeleka okukhulu kakhulu okwakheka ephepheni ngesikhathi. Lapho izingxenye zifudunyezwa, i-coating kanye ne-graphite kuyakhula, kodwa ngamazinga ahlukene. Ngakho-ke, umjikelezo ngamunye wokushisa ukhula ngokucindezeleka phakathi kwezinto ezimbili esibonakalayo. Lapho ingxenye iphola, ukucindezeleka kuphenduka ngenye indlela. Umjikelezo owodwa wokushisa nokupholisa ngeke ubangele umonakalo, nokho phakathi kwamakhulu alo mjikelezo kuvela ukucindezeleka okuncane kwangaphakathi.

Isembozo sizoba bushelelezi futhi sizinzile, kodwa ngemva kokushintsha kwezinga lokushisa okuphindaphindiwe izindawo ezincane zokucindezeleka zizokhula emaphethelweni abukhali noma ekushiseni okungalingani. Iphakathi kwengxenye lizohlala isikhathi eside, ingaphandle lengxenye lizoguga ngamathuluzi angempela. Ukuqhekeka okuncane emaphethelweni ezingxenye kuyisibonelo esivamile, ngemva kokusetshenziswa kaningi kuzokhula emaphethelweni futhi kuzoqala ukukhula njengoba ukucindezeleka kuyiphoqa ukuba ihlukane ngemva komjikelezo ngamunye wokushisa futhi ama-flakes amancane azophuma.

Ngokufudumala nokupholisa okuphindaphindiwe, i-matrix yangaphakathi yengubo iyaguga, kangangokuthi izingxenye ezimbalwa zizodlula esivivinyweni sokuqala, kodwa ngemva kokusetshenziswa isikhathi eside (izinyanga eziningana) zizoqhubeka nokonakala. Kwesinye isimo, izingxenye ziqale ukuqhekeka ngemva kwemijikelezo engamakhulu ambalwa ngenxa yokushisa okusheshayo okudala ukucindezeleka okukhulu kakhulu ngokungafani nokushisa okuhamba kancane.

Izindlela Zokwelapha Ngaphambi Kokumboza Uphahla Zokuthuthukisa Amandla Okubopha Okumboza

Kukhona ukulungiswa okubalulekile okumele kwenziwe ezingxenyeni ze-graphite ngaphambi kokufaka noma yiluphi uhlobo lokufaka ukuze ungqimba lubophe. Ukulungiswa okungekuhle kokufaka okuhle kuzomane kuholele ekufakweni okuhlulekayo ngokushesha. Ukuhlanza okujulile kwengxenye ye-graphite kungenye yezingxenye zalolu lungiselelo. I-Graphite ibamba kalula uthuli oluncane kakhulu, amafutha asele, noma izinhlayiya zokugaya ngaphakathi kwezimbobo zayo. Lezi zinto zivimbela ngokomzimba ukufakwa kokufaka ukuthi kungathinti ngqo nesisekelo.

Ngisho nefilimu encane kakhulu yamafutha izodala izindawo ezibuthakathaka ebhondini, okuzoba yizindawo zokuqala ukuxebuka. Izixazululo zokuhlanza ezizinikele zivame ukusetshenziswa noma ngezinye izikhathi ingxenye ibhakwa esithandweni ukuze kususwe noma yiziphi izinsalela ezijulile.

Okulandelayo ukuqinisekisa ukuthi ubuso buqinile kancane ukuze kwandiswe ukubamba okusebenzayo koqweqwe kunokuba ubuso bubushelelezi ngokuphelele. Lokhu ngokuvamile kufezwa ngokuqhumisa isihlabathi noma ngokuphatha amathuluzi omshini ukuze kufezwe indawo yokubamba eqinile kodwa ezinzile ukuze uqweqwe "luxhumeke" ngomshini, noma ngokusebenzisa ukwelashwa kwe-plasma okuphazamisa okwesikhashana ubuso be-graphite ngegesi ukuze kusebenze futhi kubangele ngamakhemikhali ukuthi buhambisane nezinto zokugqoka ngenkathi kungenamiphumela emibi esimweni se-substrate.

Ukwelashwa ngokushisa kwezingxenye ze-graphite kusetshenziswa ngaphambi kokumbozwa, njengoba ukubhaka ingxenye ngokushisa okuphezulu kungaxosha amagesi avalelekile ngaphakathi kwezinto. Lawa magesi angaphuma ngenkathi kufakwa imbozwa, okudala indawo efanelekile yendawo ebuthakathaka noma i-blister ngaphansi kwembozwa. Lezi zinqubo ngokuvamile zihlanganiswa.

Ukuhlaziywa Kokwehluleka Kwezindandatho Ezimbozwe Nge-TaC Ezisetshenziswa Ezinhlelweni ze-LPE (ASM)

Izindandatho ze-graphite ezimboziwe zisebenza ngaphansi kwezimo ezimbi kakhulu okuhlanganisa izinga lokushisa eliphezulu, ukugeleza kwegesi ephezulu, kanye nemijikelezo yokushisa. Izindlela zokwehluleka kwezindandatho ze-graphite ezimboziwe zivame ukuhlotshaniswa nokucindezeleka kokumboza, ikhwalithi yobuso kanye nokukhathala kokushisa.

Ukwehlukaniswa komphetho lapho ukumbozwa kuvame ukuhlukaniswa khona kusukela emaphethelweni emiphetho ebukhali kanye nengxenye encane njengoba kubhekana namazinga okupholisa nokushisa okusheshayo uma kuqhathaniswa nezingxenye ezinkulu. Ngemva kokuqala kokuphakamisa emaphethelweni, lesi simo sikhula njenge-zipper evulekile emaphethelweni.

Ukuqhekeka okuncane kungenzeka ebusweni bangaphakathi lapho ukugeleza kwegesi kunamandla kakhulu futhi kukhiqiza izindawo ezishisayo endaweni. Kutholakale inqwaba yothuli olumnyama oluncane ohlelweni olulodwa oluhlotshaniswa nemifantu emincane odongeni lwangaphakathi lwendandatho. Ukwehluleka kokubopha i-interface kungenye indlela eyisisekelo; ukunamathela okubuthakathaka ngaphansi kwesendlalelo kubangelwa ukuqhekeka kwendawo enkulu ngokuzumayo ngokuvamile ebusweni obungahlanzwanga kahle noma amagesi abanjwe endaweni ebanzi eyandayo.

Ngakolunye uhlangothi, ukujikeleza okusheshayo kokushisa kudala ukushaqeka kokushisa lapho ukucindezeleka kokushisa kungakha khona ngokushesha esibonakalayo sokugqoka/isisekelo. Kwenye inqubo yokukhiqiza indandatho yahlala izinyanga ezimbalwa kuphela. Nakuba yayibonakala ijwayelekile ekuqaleni, izinga lezinhlayiya landa kancane kancane futhi lapho isuswa ingxenye enkulu yokugqoka yayihlukanisiwe eduze kwamaphuzu okunamathisela.

Lokhu kwehluleka kubangelwa ukufudumala okungalingani kanye nokuhlanzwa okungekuhle komphetho ngaphambi kokumbozwa. Nakuba ukwehluleka kuvame ukukhula ngenxa yeziphambeko ezincane ngokuhamba kwesikhathi, ukuhlolwa okuvamile kanye nokushisa okuzinzile kungaba yizinyathelo ezinhle zokuvimbela ukwehluleka kwalolu hlobo.